JPS6184537A - 容量式センサの製造方法 - Google Patents

容量式センサの製造方法

Info

Publication number
JPS6184537A
JPS6184537A JP20663984A JP20663984A JPS6184537A JP S6184537 A JPS6184537 A JP S6184537A JP 20663984 A JP20663984 A JP 20663984A JP 20663984 A JP20663984 A JP 20663984A JP S6184537 A JPS6184537 A JP S6184537A
Authority
JP
Japan
Prior art keywords
layer
epitaxial layer
type
capacitive sensor
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20663984A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0443226B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Kyoichi Ikeda
恭一 池田
Katsumi Isozaki
克巳 磯崎
Tetsuya Watanabe
哲也 渡辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Hokushin Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Hokushin Electric Corp filed Critical Yokogawa Hokushin Electric Corp
Priority to JP20663984A priority Critical patent/JPS6184537A/ja
Publication of JPS6184537A publication Critical patent/JPS6184537A/ja
Publication of JPH0443226B2 publication Critical patent/JPH0443226B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP20663984A 1984-10-02 1984-10-02 容量式センサの製造方法 Granted JPS6184537A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20663984A JPS6184537A (ja) 1984-10-02 1984-10-02 容量式センサの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20663984A JPS6184537A (ja) 1984-10-02 1984-10-02 容量式センサの製造方法

Publications (2)

Publication Number Publication Date
JPS6184537A true JPS6184537A (ja) 1986-04-30
JPH0443226B2 JPH0443226B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-07-15

Family

ID=16526684

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20663984A Granted JPS6184537A (ja) 1984-10-02 1984-10-02 容量式センサの製造方法

Country Status (1)

Country Link
JP (1) JPS6184537A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02290524A (ja) * 1989-01-30 1990-11-30 Dresser Ind Inc 半導体ウエーハ及びその形成法とトランスジューサ及びその製法
JPH04143628A (ja) * 1990-10-05 1992-05-18 Yamatake Honeywell Co Ltd 静電容量式圧力センサ
EP0501359A3 (en) * 1991-02-25 1994-05-18 Canon Kk Semiconductor sensor of electrostatic capacitance type
US5520051A (en) * 1989-09-27 1996-05-28 Nippondenso Co., Ltd. Strain sensing device
US6250165B1 (en) 1998-02-02 2001-06-26 Denso Corporation Semiconductor physical quantity sensor
US6388300B1 (en) 1999-01-25 2002-05-14 Denso Corporation Semiconductor physical quantity sensor and method of manufacturing the same

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20230052771A1 (en) * 2020-01-31 2023-02-16 Sumitomo Metal Mining Co., Ltd. Electromagnetic wave absorbing particles, electromagnetic wave absorbing particle dispersion liquid, and method for manufacturing electromagnetic wave absorbing particles

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5764978A (en) * 1980-10-03 1982-04-20 Ibm Capacitive pressure transducer
JPS5873166A (ja) * 1981-10-13 1983-05-02 ユナイテツド・テクノロジ−ズ・コ−ポレイシヨン 容量性圧力トランスジューサの製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5764978A (en) * 1980-10-03 1982-04-20 Ibm Capacitive pressure transducer
JPS5873166A (ja) * 1981-10-13 1983-05-02 ユナイテツド・テクノロジ−ズ・コ−ポレイシヨン 容量性圧力トランスジューサの製造方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02290524A (ja) * 1989-01-30 1990-11-30 Dresser Ind Inc 半導体ウエーハ及びその形成法とトランスジューサ及びその製法
US5520051A (en) * 1989-09-27 1996-05-28 Nippondenso Co., Ltd. Strain sensing device
JPH04143628A (ja) * 1990-10-05 1992-05-18 Yamatake Honeywell Co Ltd 静電容量式圧力センサ
EP0501359A3 (en) * 1991-02-25 1994-05-18 Canon Kk Semiconductor sensor of electrostatic capacitance type
US6250165B1 (en) 1998-02-02 2001-06-26 Denso Corporation Semiconductor physical quantity sensor
US6388300B1 (en) 1999-01-25 2002-05-14 Denso Corporation Semiconductor physical quantity sensor and method of manufacturing the same

Also Published As

Publication number Publication date
JPH0443226B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-07-15

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