JPS6184375A - 化学蒸着法 - Google Patents

化学蒸着法

Info

Publication number
JPS6184375A
JPS6184375A JP20456384A JP20456384A JPS6184375A JP S6184375 A JPS6184375 A JP S6184375A JP 20456384 A JP20456384 A JP 20456384A JP 20456384 A JP20456384 A JP 20456384A JP S6184375 A JPS6184375 A JP S6184375A
Authority
JP
Japan
Prior art keywords
vapor deposition
gas
chemical vapor
gaseous
reaction chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20456384A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6149390B2 (enrdf_load_stackoverflow
Inventor
Kimio Nakada
仲田　公夫
Hiroshi Mikita
三喜田　浩
Nobuatsu Watanabe
渡辺　信淳
Takeshi Nakajima
剛 中島
Youhou Tei
容宝 鄭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OYO KAGAKU KENKYUSHO
Toho Kinzoku Co Ltd
Original Assignee
OYO KAGAKU KENKYUSHO
Toho Kinzoku Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OYO KAGAKU KENKYUSHO, Toho Kinzoku Co Ltd filed Critical OYO KAGAKU KENKYUSHO
Priority to JP20456384A priority Critical patent/JPS6184375A/ja
Publication of JPS6184375A publication Critical patent/JPS6184375A/ja
Publication of JPS6149390B2 publication Critical patent/JPS6149390B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
JP20456384A 1984-09-29 1984-09-29 化学蒸着法 Granted JPS6184375A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20456384A JPS6184375A (ja) 1984-09-29 1984-09-29 化学蒸着法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20456384A JPS6184375A (ja) 1984-09-29 1984-09-29 化学蒸着法

Publications (2)

Publication Number Publication Date
JPS6184375A true JPS6184375A (ja) 1986-04-28
JPS6149390B2 JPS6149390B2 (enrdf_load_stackoverflow) 1986-10-29

Family

ID=16492540

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20456384A Granted JPS6184375A (ja) 1984-09-29 1984-09-29 化学蒸着法

Country Status (1)

Country Link
JP (1) JPS6184375A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61157681A (ja) * 1984-12-28 1986-07-17 Toho Kinzoku Kk 化学蒸着法
US5262202A (en) * 1988-02-17 1993-11-16 Air Products And Chemicals, Inc. Heat treated chemically vapor deposited products and treatment method
WO2000047796A1 (fr) * 1999-02-11 2000-08-17 Hardide Limited Revetements de carbure de tungstene et procede de production
JP2005248231A (ja) * 2004-03-03 2005-09-15 Tokyo Electron Ltd 成膜方法
JP2021510934A (ja) * 2018-01-15 2021-04-30 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 炭化タングステン膜の接着性及び欠陥を改善する技法

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61157681A (ja) * 1984-12-28 1986-07-17 Toho Kinzoku Kk 化学蒸着法
US5262202A (en) * 1988-02-17 1993-11-16 Air Products And Chemicals, Inc. Heat treated chemically vapor deposited products and treatment method
WO2000047796A1 (fr) * 1999-02-11 2000-08-17 Hardide Limited Revetements de carbure de tungstene et procede de production
US6800383B1 (en) 1999-02-11 2004-10-05 Hardide Limited Tungsten carbide coating and method for producing the same
JP2005248231A (ja) * 2004-03-03 2005-09-15 Tokyo Electron Ltd 成膜方法
JP2021510934A (ja) * 2018-01-15 2021-04-30 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 炭化タングステン膜の接着性及び欠陥を改善する技法
US11859275B2 (en) 2018-01-15 2024-01-02 Applied Materials, Inc. Techniques to improve adhesion and defects for tungsten carbide film

Also Published As

Publication number Publication date
JPS6149390B2 (enrdf_load_stackoverflow) 1986-10-29

Similar Documents

Publication Publication Date Title
US3874900A (en) Article coated with titanium carbide and titanium nitride
US3684585A (en) Method for forming adherent titanium carbide coatings on metal or composite substrates
US3836392A (en) Process for increasing the resistance to wear of the surface of hard metal cemented carbide parts subject to wear
US3368914A (en) Process for adherently depositing a metal carbide on a metal substrate
US3771976A (en) Metal carbonitride-coated article and method of producing same
US3767456A (en) Chemical vapor deposition of steel with tantalum and columbium
JPH0892743A (ja) 被覆切削工具及びその製造方法
EP0740710A1 (en) Magnetron sputtering apparatus for compound thin films
US4486462A (en) Method for coating by glow discharge
JPS6184375A (ja) 化学蒸着法
JPS6254869B2 (enrdf_load_stackoverflow)
JPH0643243B2 (ja) タングステンカーバイトの製造方法
JP3388736B2 (ja) 複覆工具並びにその製造方法及び装置
JPS6090894A (ja) 気相成長装置
JPS623234B2 (enrdf_load_stackoverflow)
JPH0250194B2 (enrdf_load_stackoverflow)
US3552939A (en) Metal carbide coatings on metal substrates
JPH05470B2 (enrdf_load_stackoverflow)
FR2536422A1 (fr) Procede de revetement en carbures de surfaces metalliques
JPS58174569A (ja) 金属化合物被膜の形成方法
KR100312838B1 (ko) 개선된 알루미나이징 처리 방법 및 그 장치
JPS6242996B2 (enrdf_load_stackoverflow)
JP2833839B2 (ja) 気相法ダイヤモンドのコーティング方法
JPH0119468B2 (enrdf_load_stackoverflow)
JPS60149780A (ja) Ｃｖｄ被膜の形成方法