JPS6183328U - - Google Patents
Info
- Publication number
- JPS6183328U JPS6183328U JP16843284U JP16843284U JPS6183328U JP S6183328 U JPS6183328 U JP S6183328U JP 16843284 U JP16843284 U JP 16843284U JP 16843284 U JP16843284 U JP 16843284U JP S6183328 U JPS6183328 U JP S6183328U
- Authority
- JP
- Japan
- Prior art keywords
- gallium arsenide
- substrate
- arsenide layer
- resonator
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000013078 crystal Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Pressure Sensors (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16843284U JPH0526821Y2 (ru) | 1984-11-05 | 1984-11-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16843284U JPH0526821Y2 (ru) | 1984-11-05 | 1984-11-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6183328U true JPS6183328U (ru) | 1986-06-02 |
| JPH0526821Y2 JPH0526821Y2 (ru) | 1993-07-07 |
Family
ID=30726201
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16843284U Expired - Lifetime JPH0526821Y2 (ru) | 1984-11-05 | 1984-11-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0526821Y2 (ru) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0537287A (ja) * | 1990-01-03 | 1993-02-12 | Motorola Inc | 超高周波発振器／共振器 |
| JP2012244349A (ja) * | 2011-05-18 | 2012-12-10 | Nippon Telegr & Teleph Corp <Ntt> | 微小機械振動子とその製造方法 |
-
1984
- 1984-11-05 JP JP16843284U patent/JPH0526821Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0537287A (ja) * | 1990-01-03 | 1993-02-12 | Motorola Inc | 超高周波発振器／共振器 |
| JP2012244349A (ja) * | 2011-05-18 | 2012-12-10 | Nippon Telegr & Teleph Corp <Ntt> | 微小機械振動子とその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0526821Y2 (ru) | 1993-07-07 |
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