JPS6182083A - ガス切替供給装置 - Google Patents

ガス切替供給装置

Info

Publication number
JPS6182083A
JPS6182083A JP20347484A JP20347484A JPS6182083A JP S6182083 A JPS6182083 A JP S6182083A JP 20347484 A JP20347484 A JP 20347484A JP 20347484 A JP20347484 A JP 20347484A JP S6182083 A JPS6182083 A JP S6182083A
Authority
JP
Japan
Prior art keywords
gas
pressure
valve
supply line
closed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20347484A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0159473B2 (enrdf_load_stackoverflow
Inventor
Takashi Asano
孝 浅野
Yoshitsugu Kato
加藤　尚嗣
Atsuo Noguchi
野口　淳夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hoxan Corp
Hoxan Co Ltd
Original Assignee
Hoxan Corp
Hoxan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoxan Corp, Hoxan Co Ltd filed Critical Hoxan Corp
Priority to JP20347484A priority Critical patent/JPS6182083A/ja
Publication of JPS6182083A publication Critical patent/JPS6182083A/ja
Publication of JPH0159473B2 publication Critical patent/JPH0159473B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/04—Arrangement or mounting of valves
    • F17C13/045—Automatic change-over switching assembly for bottled gas systems with two (or more) gas containers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0323—Valves
    • F17C2205/0326—Valves electrically actuated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/04—Methods for emptying or filling
    • F17C2227/041—Methods for emptying or filling vessel by vessel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/04—Methods for emptying or filling
    • F17C2227/041—Methods for emptying or filling vessel by vessel
    • F17C2227/042—Methods for emptying or filling vessel by vessel with change-over from one vessel to another

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Magnetically Actuated Valves (AREA)
  • Pipeline Systems (AREA)
JP20347484A 1984-09-28 1984-09-28 ガス切替供給装置 Granted JPS6182083A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20347484A JPS6182083A (ja) 1984-09-28 1984-09-28 ガス切替供給装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20347484A JPS6182083A (ja) 1984-09-28 1984-09-28 ガス切替供給装置

Publications (2)

Publication Number Publication Date
JPS6182083A true JPS6182083A (ja) 1986-04-25
JPH0159473B2 JPH0159473B2 (enrdf_load_stackoverflow) 1989-12-18

Family

ID=16474737

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20347484A Granted JPS6182083A (ja) 1984-09-28 1984-09-28 ガス切替供給装置

Country Status (1)

Country Link
JP (1) JPS6182083A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101839396A (zh) * 2010-05-12 2010-09-22 常州亿晶光电科技有限公司 双气源气路自动转换保压装置
KR20210123183A (ko) * 2020-04-01 2021-10-13 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 이온 주입기 독가스 전달 시스템

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101839396A (zh) * 2010-05-12 2010-09-22 常州亿晶光电科技有限公司 双气源气路自动转换保压装置
KR20210123183A (ko) * 2020-04-01 2021-10-13 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 이온 주입기 독가스 전달 시스템
US11527380B2 (en) 2020-04-01 2022-12-13 Taiwan Semiconductor Manufacturing Co., Ltd. Ion implanter toxic gas delivery system

Also Published As

Publication number Publication date
JPH0159473B2 (enrdf_load_stackoverflow) 1989-12-18

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