JPS6181324A - 搬送装置 - Google Patents

搬送装置

Info

Publication number
JPS6181324A
JPS6181324A JP20248284A JP20248284A JPS6181324A JP S6181324 A JPS6181324 A JP S6181324A JP 20248284 A JP20248284 A JP 20248284A JP 20248284 A JP20248284 A JP 20248284A JP S6181324 A JPS6181324 A JP S6181324A
Authority
JP
Japan
Prior art keywords
products
product
air bearing
magnetic field
foam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP20248284A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0121048B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Atsuji Karita
充二 苅田
Masanobu Harada
正信 原田
Susumu Sugita
進 杉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinko Electric Co Ltd
Original Assignee
Shinko Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinko Electric Co Ltd filed Critical Shinko Electric Co Ltd
Priority to JP20248284A priority Critical patent/JPS6181324A/ja
Publication of JPS6181324A publication Critical patent/JPS6181324A/ja
Publication of JPH0121048B2 publication Critical patent/JPH0121048B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G54/00—Non-mechanical conveyors not otherwise provided for
    • B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic

Landscapes

  • Non-Mechanical Conveyors (AREA)
JP20248284A 1984-09-26 1984-09-26 搬送装置 Granted JPS6181324A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20248284A JPS6181324A (ja) 1984-09-26 1984-09-26 搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20248284A JPS6181324A (ja) 1984-09-26 1984-09-26 搬送装置

Publications (2)

Publication Number Publication Date
JPS6181324A true JPS6181324A (ja) 1986-04-24
JPH0121048B2 JPH0121048B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-04-19

Family

ID=16458237

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20248284A Granted JPS6181324A (ja) 1984-09-26 1984-09-26 搬送装置

Country Status (1)

Country Link
JP (1) JPS6181324A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0619253A1 (en) * 1993-03-11 1994-10-12 United States Surgical Corporation Methods and apparatus for transporting and positioning micro-mechanical parts
EP1180486A3 (de) * 2000-08-08 2002-07-31 Forschungszentrum Karlsruhe GmbH Fördereinrichtung für den berührungslosen Transport von Bauteilen
KR101111360B1 (ko) * 2005-06-15 2012-02-24 램 리써치 코포레이션 비뉴턴 유체를 이용하여 기판을 이송하는 방법 및 장치

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0619253A1 (en) * 1993-03-11 1994-10-12 United States Surgical Corporation Methods and apparatus for transporting and positioning micro-mechanical parts
US5413203A (en) * 1993-03-11 1995-05-09 United States Surgical Corporation Methods and apparatus for transporting and positioning micro-mechanical parts
EP1180486A3 (de) * 2000-08-08 2002-07-31 Forschungszentrum Karlsruhe GmbH Fördereinrichtung für den berührungslosen Transport von Bauteilen
KR101111360B1 (ko) * 2005-06-15 2012-02-24 램 리써치 코포레이션 비뉴턴 유체를 이용하여 기판을 이송하는 방법 및 장치

Also Published As

Publication number Publication date
JPH0121048B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-04-19

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