JPS6180637A - Manufacture of photomagnetic recording medium - Google Patents
Manufacture of photomagnetic recording mediumInfo
- Publication number
- JPS6180637A JPS6180637A JP20166384A JP20166384A JPS6180637A JP S6180637 A JPS6180637 A JP S6180637A JP 20166384 A JP20166384 A JP 20166384A JP 20166384 A JP20166384 A JP 20166384A JP S6180637 A JPS6180637 A JP S6180637A
- Authority
- JP
- Japan
- Prior art keywords
- recording medium
- film
- heat treatment
- heat
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
- G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
- G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明は光磁気記録媒体の製造方法に係り、特に、多数
回の繰り返し記録・再生・消去に対して安定な搬送波対
雑音比（Ｃ／Ｎ）を有し、その特性変化が小さい光磁気
記録媒体の製造に好適な光磁気記録媒体の製造方法に関
する。[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to a method for manufacturing a magneto-optical recording medium, and in particular, to a method for manufacturing a magneto-optical recording medium, in particular, a method for producing a carrier-to-noise ratio (C/N ), and relates to a method for manufacturing a magneto-optical recording medium suitable for manufacturing a magneto-optical recording medium with small changes in characteristics.
一度記録した情報を消去し、繰り返し使用することがで
きる光記録として光磁気記録が注目を浴びている。ただ
し、記録・再生・消去を多数回繰り返した場合、Ｃ／Ｎ
が次第に低下したり、高温環境下では、その特性が次第
に劣化したりすることが知られている。この原因は主と
して、記録媒体に用いられる非晶質磁性薄膜（Ｔｂ−Ｆ
ｅ、Ｔｂ−Ｆｅ−Ｇｏなど）の垂直磁気異方性が、熱履
歴や熱活性化を受けて次第に低下するためである。しか
るに、従来の製造方法ではこの問題点を充分認識してお
らず１作製状態のままで記録媒体として使用されている
。非晶質薄膜の磁気異方性低下に関しては、例えば、Ｉ
ＥＥＥ Ｔｒａｎｓ、 Ｍａｇｎ、 ＭＡＧ−１３゜１
６０３ （１９７７）における片山らによる”ＤＩＦＦ
ＥＲＥＮＴＯＲＩＧＩＮ ＯＦ ＴＩＩＥ １）
ＥＲＰＥＮＤＩＣＵＬＡＲＡＮＩＳＯＴＲＯＰ’／
ＩＮＡＭＯＲＰＩＩＯυＳ Ｇｄ−Ｆｅ ＦＲＯＭ Ｇ
ｄ−Ｃｏ ＦＩＬＭＳ”において論じられている。Magneto-optical recording is attracting attention as an optical record that can erase information once recorded and use it repeatedly. However, if recording/playback/erasing is repeated many times, the C/N
It is known that its properties gradually decrease in high temperature environments. This is mainly due to the amorphous magnetic thin film (Tb-F
This is because the perpendicular magnetic anisotropy of the materials (e.g., Tb-Fe-Go, etc.) gradually decreases as a result of thermal history and thermal activation. However, in the conventional manufacturing method, this problem is not sufficiently recognized and the recording medium is used as a recording medium in its original state. Regarding the decrease in magnetic anisotropy of amorphous thin films, for example, I
EEE Trans, Magn, MAG-13゜1
603 (1977) by Katayama et al.
ERENTORIGIN OF TIIE 1)
ERPENDICULARANISOTROP'/
INAMORPIIOυS Gd-Fe FROM G
d-Co FILMS”.
本発明の目的は、熱履歴や熱活性化に対してその垂直磁
気異方性が安定に保たれるような、光磁気記録媒体の製
造方法を提供することにある。An object of the present invention is to provide a method for manufacturing a magneto-optical recording medium whose perpendicular magnetic anisotropy is maintained stably against thermal history and thermal activation.
上記目的を達成するために本発明では、光磁気記録媒体
の製造方法において、該記録媒体を熱処理することを特
徴としている。In order to achieve the above object, the present invention is characterized in that, in a method for manufacturing a magneto-optical recording medium, the recording medium is subjected to heat treatment.
すなわち、光磁気記録媒体として用いる希土類と遷移金
属からなる非晶質磁性薄膜（たとえば、Ｔｂ−Ｆｅ、
Ｔｂ−Ｃｏ、 Ｔｂ−Ｆｅ−Ｇｏ、 Ｇｄ−Ｇｏ。That is, an amorphous magnetic thin film (for example, Tb-Fe,
Tb-Co, Tb-Fe-Go, Gd-Go.
Ｇｄ −Ｆｅ、 Ｇｄ −Ｔｂ −Ｆｅ、 ・・・・・
）を１００〜５００℃の温度範囲で数分〜数時間程度熱
処理し。Gd -Fe, Gd -Tb -Fe, ...
) is heat treated at a temperature range of 100 to 500°C for several minutes to several hours.
熱履歴や熱活性化に対して垂直磁気異方性の安定を図る
ものである。熱処理は、酸化による特性劣化を防止する
ため不活性ガス（Ｎ ２．Ａｒ、Ｎｅ等）中か真空中で
行うことが望ましいが、磁性薄膜上に保護膜（Ｓｉｎ２
．ＳｉＯ等）を形成すれば大気中で行っても差支えない
。This aims to stabilize perpendicular magnetic anisotropy against thermal history and thermal activation. The heat treatment is preferably performed in an inert gas (N2, Ar, Ne, etc.) or vacuum to prevent property deterioration due to oxidation.
．． There is no problem even if the process is carried out in the atmosphere, provided that SiO, etc.) is formed.
以下本発明の（−）の実施例を図面を用いて説明する。 Embodiments (-) of the present invention will be described below with reference to the drawings.
第１図は、５ｉｎ２膜で表面を覆ったＴｂ−Ｆｅ非晶質
薄膜（キュリ一温度：１４５℃）を、３Ｑ／ｍｉｎの大
気圧Ｎ２流雰囲気中で２００ ’Ｃの温度で熱処理した
ときの、−軸異方性定数Ｋｕ（初期値で規格化されてい
る）の時間変化を示したものである。尚、Ｔｂ−Ｆｅ非
晶質膜、ＳｉＯ２膜は高周波スパッタ法（Ａｒ：５Ｘ１
０−３Ｔｏｒｒ）により順次基板上にそれぞれ１０００
人積層に製造した。また、Ｔｂ−Ｆｅ非晶質膜の組成は
Ｔｂを２５８七％、Ｆｅを７５ａｔ％とした。Figure 1 shows the results when a Tb-Fe amorphous thin film (Curie temperature: 145°C) whose surface was covered with a 5in2 film was heat-treated at a temperature of 200'C in an atmosphere of atmospheric pressure N2 flow at 3Q/min. , shows the time change of the -axis anisotropy constant Ku (normalized by the initial value). Note that the Tb-Fe amorphous film and SiO2 film were prepared by high-frequency sputtering method (Ar: 5X1
0-3 Torr) on the substrate sequentially.
Manufactured in layers. The composition of the Tb-Fe amorphous film was 2587% Tb and 75 at% Fe.
Ｋｕは約１０分間の熱処理後一定となり安定することが
わかる。従来の製造方法では、蒸着法やスパッタ法でＴ
ｂ−Ｆｅ非晶質膜を作製した後、熱処理工程を終ること
がなかった。そのため、繰り返し記録・消去による温度
上昇や熱履歴により第１図に示した１０分間の熱処理と
同様な効果が現れ。It can be seen that Ku becomes constant and stable after about 10 minutes of heat treatment. In conventional manufacturing methods, T
After producing the b-Fe amorphous film, the heat treatment process was never completed. Therefore, due to the temperature rise and thermal history due to repeated recording and erasing, an effect similar to that of the 10-minute heat treatment shown in FIG. 1 appears.
第３図に示すようにＣ／Ｎ （初期値で規格化されてい
る）の低下が１０４〜１０５回の繰り返し記録・消去回
数で認められる。第２図は第１図に示した実験で用いた
Ｔｂ−Ｆｅ薄膜（２００’Ｃ，１０分間の熱処理が施さ
れている）を再び２００℃で熱処理したときのＫｕの変
化を示したものである。As shown in FIG. 3, a decrease in C/N (normalized to the initial value) is observed after 104 to 105 repeated recording/erasing times. Figure 2 shows the change in Ku when the Tb-Fe thin film used in the experiment shown in Figure 1 (heat treated at 200'C for 10 minutes) was heat treated again at 200°C. be.
すなわち、これによれば２００°Ｃ，ｔＯ分間の熱処理
をＴｂ−Ｆｅ薄膜に施したことにより、熱履歴。That is, according to this, the Tb-Fe thin film was subjected to heat treatment at 200°C for tO minutes, thereby changing its thermal history.
熱活性化に対するＫｕの安定化が図られていることがわ
かる。この熱処理した薄膜を使用したときには第４図に
示すように１０’〜１ｏ８回の繰り返し記録・消去回数
までＣ／Ｎが一定になった。It can be seen that Ku is stabilized against thermal activation. When this heat-treated thin film was used, as shown in FIG. 4, the C/N remained constant up to a number of repeated recording and erasing times of 10' to 108 times.
記録媒体の熱処理は、第５図に示したように磁性薄膜形
成後でもよいし、第６図に示すように保護膜（ＳｊＯ２
，Ｓｉ、Ｎ ４など）や反射膜（ＡＱ。The heat treatment of the recording medium may be performed after forming the magnetic thin film as shown in FIG. 5, or after the formation of the protective film (SjO2
, Si, N4, etc.) and reflective films (AQ.
Ｃｕなど）などの積層膜を形成してからでもよい。This may be done after forming a laminated film of Cu, etc.).
上述の試料は第６図に示すプロセスを経て熱処理されて
いる。もちろん大気中で熱処理を行ってもよいが、酸化
による特性劣化を最小限に押さえるためには不活性ガス
（前述のＮ２やＡｒ、Ｈｅなど）中か、真空中で行うこ
とが望ましい。尚、大気中で熱処理を行う場合には磁性
薄膜上に保護膜（ＳｉＯ２、ＳｉＯ，Ｓｉ、Ｎ４など）
を形成してから行うことが望ましい。The above-mentioned sample was heat treated through the process shown in FIG. Of course, the heat treatment may be performed in the air, but in order to minimize property deterioration due to oxidation, it is preferable to perform the heat treatment in an inert gas (such as the aforementioned N2, Ar, or He) or in a vacuum. In addition, when heat treatment is performed in the atmosphere, a protective film (SiO2, SiO, Si, N4, etc.) is applied on the magnetic thin film.
It is desirable to do this after forming the
熱処理温度は磁性落脱の特性に依存する。たとえばキュ
リ一点記録材料（Ｄｙ −Ｆｅ、 Ｔｂ −Ｆｅ −Ｃ
ｏなど）ではキュリ一温度が８０〜２００℃の温度範囲
にあるので、低くともｔｏｏ’ｃ以上の温度で熱処理を
行う必要がある。一方、上述の材料では３５０〜４５０
°Ｃで非晶質から結晶質への相変化が生じるため、熱処
理温度はこれ以上でなければならない。ただし、Ｇｅや
Ｗなどの元素を添加することにより上述の材料の結晶化
温度は５００℃程度まで上昇するため、熱処理温度の上
限は５００℃が適当である。The heat treatment temperature depends on the characteristics of the magnetic drop. For example, Curie single point recording material (Dy -Fe, Tb -Fe -C
Since the Curie temperature is in the temperature range of 80 to 200°C, it is necessary to perform the heat treatment at a temperature of at least too'c or higher. On the other hand, the above materials have a
Since a phase change from amorphous to crystalline occurs at °C, the heat treatment temperature must be higher than this temperature. However, since the crystallization temperature of the above-mentioned materials increases to about 500°C by adding elements such as Ge and W, it is appropriate that the upper limit of the heat treatment temperature is 500°C.
熱処理時間は熱処理温度によって変える必要があり、お
おむね、数分〜数時間程度である。高温度で熱処理する
ほど短時間でよい。The heat treatment time needs to be changed depending on the heat treatment temperature, and is generally about several minutes to several hours. The higher the heat treatment, the shorter the time required.
次に第７図を用いて本発明の他の実施例を説明する。第
７図はガラス基板Ｉ上にＳｉ、Ｎ、膜２゜Ｔｂ−Ｆｅ膜
３（組成、（原子数パーセント）２５ニア０ ： ５）
、Ｓｉ、Ｎ４膜２をスパッタリングにより順次それぞれ
ｔｏｏｏ人積層して製造した光磁気記録媒体である。こ
の製造状態のままの媒体（Ａ）と、′！Ｍ造後真後真空
中２５０℃の温度で３０分保持し熱処理を旋した媒体（
Ｂ）とを１！！何し、温度２００℃、湿度９０％の環境
試験を行ったときのＫｕの変化を第８図に示す。媒体（
Ｂ）では熱処理効果により、垂直異方性が極めて安定化
していることがわかる。またこの環境試験により、媒体
（Ａ）では垂直異方性と同時にカー回転角が徐々に減少
したが、媒体（Ｂ）ではＫｕと同様にほぼ一定の値を保
持し続けた。Next, another embodiment of the present invention will be described using FIG. Figure 7 shows a Si, N, film 2°Tb-Fe film 3 (composition, (atomic percent) 25 near 0:5) on a glass substrate I.
This is a magneto-optical recording medium manufactured by sequentially laminating too many , Si, and N4 films 2 by sputtering. This medium (A) in its manufactured state and '! The medium (
B) and 1! ! FIG. 8 shows the change in Ku when an environmental test was conducted at a temperature of 200° C. and a humidity of 90%. Medium (
In B), it can be seen that the perpendicular anisotropy is extremely stabilized due to the heat treatment effect. Further, in this environmental test, in the medium (A), the Kerr rotation angle gradually decreased at the same time as the perpendicular anisotropy, but in the medium (B), it continued to maintain a substantially constant value like Ku.
また、他の希土類と遷移金層からなる非晶質磁性薄膜（
Ｔｂ −Ｇｏ、 Ｇｄ −Ｆｅ、 Ｇｄ −Ｇｏ、 Ｃ
ｄ −Ｔｂ−Ｆｅ薄膜等）においても熱処理により上述
した効果が認められた。In addition, an amorphous magnetic thin film consisting of other rare earth elements and a transition gold layer (
Tb-Go, Gd-Fe, Gd-Go, C
d -Tb-Fe thin film, etc.), the above-mentioned effect was also observed by heat treatment.
以上詳細に説明したように本発明によれば、記録媒体を
熱処理することにより、垂直磁気異方性の安定化を大幅
に図ることができる。As described in detail above, according to the present invention, perpendicular magnetic anisotropy can be significantly stabilized by heat-treating the recording medium.
第１図、第２図は熱処理によるＫｕの変化を示す図、第
３図、第４図は繰り返し記録・消去回数に対するＣ／Ｎ
の変化を示す図、第５図、第６図は熱処理時間を示す図
、第７図は光磁気記録媒体の一例を示す断面図、第８図
は製造法の異なる２つの記録媒体のＫｕの変化を示す図
である。
１・・・ガラス基板、 ２・・・５ｉ−ＪＮ４膜。
３−Ｔｂ−Ｆｅ−Ｇｏ膜。
大地膚ヒｃ／ＡＩ（Ａモス、序Ａ立）
第夕図
第 Ｉ
笛 ７図
第 ２図
片間（分）Figures 1 and 2 are diagrams showing changes in Ku due to heat treatment, Figures 3 and 4 are C/N versus number of repeated recording/erasing times.
Figures 5 and 6 are diagrams showing heat treatment times, Figure 7 is a cross-sectional view of an example of a magneto-optical recording medium, and Figure 8 is a graph of Ku of two recording media manufactured using different manufacturing methods. It is a figure showing a change. 1...Glass substrate, 2...5i-JN4 film. 3-Tb-Fe-Go film. Daichihadahic/AI (A moss, introduction A standing) Evening figure I Flute 7 figure 2 Katama (minute)
Claims (1)
に用いた光磁気記録媒体の製造方法において、光磁気記
録媒体層を所定基板上に形成する工程、該記録媒体を１
００〜５００℃の温度範囲で熱処理する工程を有するこ
とを特徴とする光磁気記録媒体の製造方法。In a method of manufacturing a magneto-optical recording medium using an amorphous magnetic thin film made of rare earth and transition metal as a recording medium, a step of forming a magneto-optical recording medium layer on a predetermined substrate,
A method for manufacturing a magneto-optical recording medium, comprising a step of heat treatment at a temperature range of 00 to 500°C.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20166384A JPS6180637A (en) | 1984-09-28 | 1984-09-28 | Manufacture of photomagnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20166384A JPS6180637A (en) | 1984-09-28 | 1984-09-28 | Manufacture of photomagnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6180637A true JPS6180637A (en) | 1986-04-24 |
Family
ID=16444833
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20166384A Pending JPS6180637A (en) | 1984-09-28 | 1984-09-28 | Manufacture of photomagnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6180637A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62298046A (en) * | 1986-06-17 | 1987-12-25 | Nec Corp | Production of magnet-optical recording medium |
| JPS63317946A (en) * | 1987-06-19 | 1988-12-26 | Seiko Epson Corp | Production of magneto-optical recording medium |
| WO2000074044A1 (en) * | 1999-05-28 | 2000-12-07 | Fujitsu Limited | Magnetic recording medium and magnetic disk |
-
1984
- 1984-09-28 JP JP20166384A patent/JPS6180637A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62298046A (en) * | 1986-06-17 | 1987-12-25 | Nec Corp | Production of magnet-optical recording medium |
| JPS63317946A (en) * | 1987-06-19 | 1988-12-26 | Seiko Epson Corp | Production of magneto-optical recording medium |
| WO2000074044A1 (en) * | 1999-05-28 | 2000-12-07 | Fujitsu Limited | Magnetic recording medium and magnetic disk |
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