JPS6179760A - 活性化反応性イオンプレ−テイングによるアルミニウム酸化物被膜形成法 - Google Patents
活性化反応性イオンプレ−テイングによるアルミニウム酸化物被膜形成法Info
- Publication number
- JPS6179760A JPS6179760A JP20239984A JP20239984A JPS6179760A JP S6179760 A JPS6179760 A JP S6179760A JP 20239984 A JP20239984 A JP 20239984A JP 20239984 A JP20239984 A JP 20239984A JP S6179760 A JPS6179760 A JP S6179760A
- Authority
- JP
- Japan
- Prior art keywords
- ion plating
- aluminum oxide
- substrate
- oxide film
- hard
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007733 ion plating Methods 0.000 title claims abstract description 17
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 title claims description 19
- 230000015572 biosynthetic process Effects 0.000 title 1
- 239000000758 substrate Substances 0.000 claims abstract description 19
- 229910052751 metal Inorganic materials 0.000 claims abstract description 3
- 239000002184 metal Substances 0.000 claims abstract description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 5
- 238000001704 evaporation Methods 0.000 abstract description 5
- 238000010891 electric arc Methods 0.000 abstract description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 2
- 229910052593 corundum Inorganic materials 0.000 abstract 2
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 2
- 229910000831 Steel Inorganic materials 0.000 abstract 1
- 239000010959 steel Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 description 13
- 239000007789 gas Substances 0.000 description 10
- 239000011248 coating agent Substances 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000010960 cold rolled steel Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005755 formation reaction Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/081—Oxides of aluminium, magnesium or beryllium
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20239984A JPS6179760A (ja) | 1984-09-27 | 1984-09-27 | 活性化反応性イオンプレ−テイングによるアルミニウム酸化物被膜形成法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20239984A JPS6179760A (ja) | 1984-09-27 | 1984-09-27 | 活性化反応性イオンプレ−テイングによるアルミニウム酸化物被膜形成法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6179760A true JPS6179760A (ja) | 1986-04-23 |
| JPS633021B2 JPS633021B2 (enrdf_load_stackoverflow) | 1988-01-21 |
Family
ID=16456852
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20239984A Granted JPS6179760A (ja) | 1984-09-27 | 1984-09-27 | 活性化反応性イオンプレ−テイングによるアルミニウム酸化物被膜形成法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6179760A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1994021839A1 (en) * | 1993-03-15 | 1994-09-29 | Kabushiki Kaisha Kobeseikosho | Apparatus and system for arc ion plating |
| US5879823A (en) * | 1995-12-12 | 1999-03-09 | Kennametal Inc. | Coated cutting tool |
| KR100430410B1 (ko) * | 2000-08-24 | 2004-05-04 | 재단법인 포항산업과학연구원 | 이온플레이팅에 의한 알루미늄 피막의 제조방법 |
| US20230227646A1 (en) * | 2022-01-17 | 2023-07-20 | National Technology & Engineering Solutions Of Sandia, Llc | Method of tuning physical properties of thermosets |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5322168A (en) * | 1976-08-12 | 1978-03-01 | Tsuneo Nishida | Apparatus and process for ionic plating of hottcathode discharge type |
-
1984
- 1984-09-27 JP JP20239984A patent/JPS6179760A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5322168A (en) * | 1976-08-12 | 1978-03-01 | Tsuneo Nishida | Apparatus and process for ionic plating of hottcathode discharge type |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1994021839A1 (en) * | 1993-03-15 | 1994-09-29 | Kabushiki Kaisha Kobeseikosho | Apparatus and system for arc ion plating |
| US5879823A (en) * | 1995-12-12 | 1999-03-09 | Kennametal Inc. | Coated cutting tool |
| KR100430410B1 (ko) * | 2000-08-24 | 2004-05-04 | 재단법인 포항산업과학연구원 | 이온플레이팅에 의한 알루미늄 피막의 제조방법 |
| US20230227646A1 (en) * | 2022-01-17 | 2023-07-20 | National Technology & Engineering Solutions Of Sandia, Llc | Method of tuning physical properties of thermosets |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS633021B2 (enrdf_load_stackoverflow) | 1988-01-21 |
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