JPS6173142U - - Google Patents

Info

Publication number
JPS6173142U
JPS6173142U JP15755884U JP15755884U JPS6173142U JP S6173142 U JPS6173142 U JP S6173142U JP 15755884 U JP15755884 U JP 15755884U JP 15755884 U JP15755884 U JP 15755884U JP S6173142 U JPS6173142 U JP S6173142U
Authority
JP
Japan
Prior art keywords
workpiece
glass plate
laser light
lens
moves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15755884U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15755884U priority Critical patent/JPS6173142U/ja
Publication of JPS6173142U publication Critical patent/JPS6173142U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
図は本考案の一実施例の構成説明図である。 １…レーザ光源、２…変調器、３…ビームエキ
スパンダ、４…偏光ビームスプリツタ、５…位相
板、６…集光レンズ群、７…自動焦点検出光学系
、８…センサ、９…サーボアンプ、１０…フオー
カス用アクチユエータ、１１…ワーク、１１１…
フオトレジスト塗布面、１２…ガラス板、１３…
回転機構、１４…移動機構、１５…パターンジエ
ネレータ。

Claims (1)

    【実用新案登録請求の範囲】
  1. フオトレジスト膜をコーテイングしたワークを
    動かす方式のレーザー露光装置において、ワーク
    とレーザー光を焦光するレンズとの間に該ワーク
    を覆つて設置されたガラス板を具備したことを特
    徴とするレーザー露光装置。
JP15755884U 1984-10-18 1984-10-18 Pending JPS6173142U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15755884U JPS6173142U (ja) 1984-10-18 1984-10-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15755884U JPS6173142U (ja) 1984-10-18 1984-10-18

Publications (1)

Publication Number Publication Date
JPS6173142U true JPS6173142U (ja) 1986-05-17

Family

ID=30715548

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15755884U Pending JPS6173142U (ja) 1984-10-18 1984-10-18

Country Status (1)

Country Link
JP (1) JPS6173142U (ja)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4720843U (ja) * 1971-03-18 1972-11-09
JPS5344204A (en) * 1976-10-04 1978-04-20 Kansai Paint Co Ltd Method of producing photosensitive resin
JPS5614839A (en) * 1979-07-18 1981-02-13 Nissan Motor Co Ltd Solid propellant rocket motor
JPS5667984A (en) * 1979-11-09 1981-06-08 Fujitsu Ltd Method of printing printed board
JPS5636179B2 (ja) * 1973-11-09 1981-08-22

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4720843U (ja) * 1971-03-18 1972-11-09
JPS5636179B2 (ja) * 1973-11-09 1981-08-22
JPS5344204A (en) * 1976-10-04 1978-04-20 Kansai Paint Co Ltd Method of producing photosensitive resin
JPS5614839A (en) * 1979-07-18 1981-02-13 Nissan Motor Co Ltd Solid propellant rocket motor
JPS5667984A (en) * 1979-11-09 1981-06-08 Fujitsu Ltd Method of printing printed board

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