JPS6163391U - - Google Patents

Info

Publication number
JPS6163391U
JPS6163391U JP1985113766U JP11376685U JPS6163391U JP S6163391 U JPS6163391 U JP S6163391U JP 1985113766 U JP1985113766 U JP 1985113766U JP 11376685 U JP11376685 U JP 11376685U JP S6163391 U JPS6163391 U JP S6163391U
Authority
JP
Japan
Prior art keywords
aperture slit
laser
processing apparatus
laser beam
aperture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1985113766U
Other languages
English (en)
Other versions
JPH0231278Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985113766U priority Critical patent/JPH0231278Y2/ja
Publication of JPS6163391U publication Critical patent/JPS6163391U/ja
Application granted granted Critical
Publication of JPH0231278Y2 publication Critical patent/JPH0231278Y2/ja
Expired legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図、及び第２図は各々本考案に係る投影方
式のレーザ加工装置に設置された開口スリツトの
一実施例を示す図、第３図は通常の投影方式のレ
ーザ加工装置を示す原理的構成図、第４図は従来
の投影方式のレーザ加工装置に設置された開口ス
リツトの構成図である。 符号の説明、１２，１３，１４…開口スリツト
。

Claims (1)

    【実用新案登録請求の範囲】
  1. レーザ発振器を、該レーザ発振器から出力され
    るレーザ光を絞る開口スリツトと、該開口スリツ
    トの像を被加工物上に投影照射するための対物レ
    ンズとを有する開口スリツト像投影方式のレーザ
    加工装置において、上記開口スリツトを構成する
    各部材を光軸に対して直角方向に遂次移動して開
    口スリツトがレーザ光の熱で損傷を受けないよう
    に構成したことを特徴とするレーザ加工装置。
JP1985113766U 1985-07-26 1985-07-26 Expired JPH0231278Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985113766U JPH0231278Y2 (ja) 1985-07-26 1985-07-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985113766U JPH0231278Y2 (ja) 1985-07-26 1985-07-26

Publications (2)

Publication Number Publication Date
JPS6163391U true JPS6163391U (ja) 1986-04-30
JPH0231278Y2 JPH0231278Y2 (ja) 1990-08-23

Family

ID=30672791

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985113766U Expired JPH0231278Y2 (ja) 1985-07-26 1985-07-26

Country Status (1)

Country Link
JP (1) JPH0231278Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010188370A (ja) * 2009-02-17 2010-09-02 Aisin Seiki Co Ltd レーザ加工装置及びレーザ加工方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010188370A (ja) * 2009-02-17 2010-09-02 Aisin Seiki Co Ltd レーザ加工装置及びレーザ加工方法

Also Published As

Publication number Publication date
JPH0231278Y2 (ja) 1990-08-23

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