JPH0221729U - - Google Patents
Info
- Publication number
- JPH0221729U JPH0221729U JP1988099452U JP9945288U JPH0221729U JP H0221729 U JPH0221729 U JP H0221729U JP 1988099452 U JP1988099452 U JP 1988099452U JP 9945288 U JP9945288 U JP 9945288U JP H0221729 U JPH0221729 U JP H0221729U
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- detection sensor
- condenses
- monitors
- creating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Lasers (AREA)
Description
第１図は本考案の実施例１を示す構成図、第２
図は実施例２を示す構成図である。 １，４……反射ミラー、２，５……集光レンズ
、３，６……ビーム位置検出センサ、７，８……
反射ミラー調整用モータ。
図は実施例２を示す構成図である。 １，４……反射ミラー、２，５……集光レンズ
、３，６……ビーム位置検出センサ、７，８……
反射ミラー調整用モータ。
Claims (1)
- レーザ光を用いて試料上に回折格子を作成する
装置において、レーザ光を集光する集光レンズと
、集光したビーム位置をモニタするビーム位置検
出センサとを有することを特徴とする干渉露光装
置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988099452U JPH0221729U (ja) | 1988-07-27 | 1988-07-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988099452U JPH0221729U (ja) | 1988-07-27 | 1988-07-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0221729U true JPH0221729U (ja) | 1990-02-14 |
Family
ID=31326624
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988099452U Pending JPH0221729U (ja) | 1988-07-27 | 1988-07-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0221729U (ja) |
-
1988
- 1988-07-27 JP JP1988099452U patent/JPH0221729U/ja active Pending