JPS6172219A - 露光装置 - Google Patents

露光装置

Info

Publication number
JPS6172219A
JPS6172219A JP59193032A JP19303284A JPS6172219A JP S6172219 A JPS6172219 A JP S6172219A JP 59193032 A JP59193032 A JP 59193032A JP 19303284 A JP19303284 A JP 19303284A JP S6172219 A JPS6172219 A JP S6172219A
Authority
JP
Japan
Prior art keywords
collimator lens
light
transfer surface
receiving means
light receiving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59193032A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0347569B2 (enEXAMPLES
Inventor
Yutaka Echizen
裕 越前
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP59193032A priority Critical patent/JPS6172219A/ja
Publication of JPS6172219A publication Critical patent/JPS6172219A/ja
Publication of JPH0347569B2 publication Critical patent/JPH0347569B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP59193032A 1984-09-15 1984-09-15 露光装置 Granted JPS6172219A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59193032A JPS6172219A (ja) 1984-09-15 1984-09-15 露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59193032A JPS6172219A (ja) 1984-09-15 1984-09-15 露光装置

Publications (2)

Publication Number Publication Date
JPS6172219A true JPS6172219A (ja) 1986-04-14
JPH0347569B2 JPH0347569B2 (enEXAMPLES) 1991-07-19

Family

ID=16301031

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59193032A Granted JPS6172219A (ja) 1984-09-15 1984-09-15 露光装置

Country Status (1)

Country Link
JP (1) JPS6172219A (enEXAMPLES)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105242500A (zh) * 2015-11-10 2016-01-13 中国科学院光电技术研究所 一种基于紫外宽光谱泰伯自成像的光刻系统

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51126073A (en) * 1975-04-25 1976-11-02 Hitachi Ltd Pattern printing equpment made available by photo-etching method
JPS5859595A (ja) * 1981-10-02 1983-04-08 株式会社和廣武 人工光源装置
JPS58196023A (ja) * 1982-03-29 1983-11-15 フユ−ジヨン・システムズ・コ−ポレ−シヨン 深紫外線フオトリトグラフイ−を達成する方法及び装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51126073A (en) * 1975-04-25 1976-11-02 Hitachi Ltd Pattern printing equpment made available by photo-etching method
JPS5859595A (ja) * 1981-10-02 1983-04-08 株式会社和廣武 人工光源装置
JPS58196023A (ja) * 1982-03-29 1983-11-15 フユ−ジヨン・システムズ・コ−ポレ−シヨン 深紫外線フオトリトグラフイ−を達成する方法及び装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105242500A (zh) * 2015-11-10 2016-01-13 中国科学院光电技术研究所 一种基于紫外宽光谱泰伯自成像的光刻系统
CN105242500B (zh) * 2015-11-10 2017-07-11 中国科学院光电技术研究所 一种基于紫外宽光谱泰伯自成像的光刻系统

Also Published As

Publication number Publication date
JPH0347569B2 (enEXAMPLES) 1991-07-19

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term