JPS617031U - 半導体ウエ−ハの粉末ガラス塗布装置 - Google Patents

半導体ウエ−ハの粉末ガラス塗布装置

Info

Publication number
JPS617031U
JPS617031U JP9232984U JP9232984U JPS617031U JP S617031 U JPS617031 U JP S617031U JP 9232984 U JP9232984 U JP 9232984U JP 9232984 U JP9232984 U JP 9232984U JP S617031 U JPS617031 U JP S617031U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
centrifuge
glass coating
powder glass
frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9232984U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0222991Y2 (cg-RX-API-DMAC7.html
Inventor
勉 南
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP9232984U priority Critical patent/JPS617031U/ja
Publication of JPS617031U publication Critical patent/JPS617031U/ja
Application granted granted Critical
Publication of JPH0222991Y2 publication Critical patent/JPH0222991Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Formation Of Insulating Films (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
JP9232984U 1984-06-18 1984-06-18 半導体ウエ−ハの粉末ガラス塗布装置 Granted JPS617031U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9232984U JPS617031U (ja) 1984-06-18 1984-06-18 半導体ウエ−ハの粉末ガラス塗布装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9232984U JPS617031U (ja) 1984-06-18 1984-06-18 半導体ウエ−ハの粉末ガラス塗布装置

Publications (2)

Publication Number Publication Date
JPS617031U true JPS617031U (ja) 1986-01-16
JPH0222991Y2 JPH0222991Y2 (cg-RX-API-DMAC7.html) 1990-06-21

Family

ID=30649029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9232984U Granted JPS617031U (ja) 1984-06-18 1984-06-18 半導体ウエ−ハの粉末ガラス塗布装置

Country Status (1)

Country Link
JP (1) JPS617031U (cg-RX-API-DMAC7.html)

Also Published As

Publication number Publication date
JPH0222991Y2 (cg-RX-API-DMAC7.html) 1990-06-21

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