JPS6169264U - - Google Patents

Info

Publication number
JPS6169264U
JPS6169264U JP15298084U JP15298084U JPS6169264U JP S6169264 U JPS6169264 U JP S6169264U JP 15298084 U JP15298084 U JP 15298084U JP 15298084 U JP15298084 U JP 15298084U JP S6169264 U JPS6169264 U JP S6169264U
Authority
JP
Japan
Prior art keywords
metal
electron gun
heating evaporation
deflecting
evaporated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15298084U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15298084U priority Critical patent/JPS6169264U/ja
Publication of JPS6169264U publication Critical patent/JPS6169264U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Manufacture And Refinement Of Metals (AREA)
  • Physical Vapour Deposition (AREA)

Description

【図面の簡単な説明】
第１図は本考案の金属の加熱蒸発装置の実施例
を示す切断正面図、第２図は第１図の側面図、第
３図は従来の金属の加熱蒸発装置の一例を示す切
断正面図である。 １は真空容器、２は電極コイル、３はるつぼ、
４は電子銃、５は電子ビーム、６は金属を示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. 円弧状真空容器内に蒸発させる金属を置くと共
    に該金属の表面より下方位置に電子銃を設置し、
    且つ上記電子銃からの電子ビームを偏向させて金
    属表面に直角に入射させるための磁界を作る電磁
    コイルを、上記真空容器外周部に取り付けたこと
    を特徴とする金属の加熱蒸発装置。
JP15298084U 1984-10-09 1984-10-09 Pending JPS6169264U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15298084U JPS6169264U (ja) 1984-10-09 1984-10-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15298084U JPS6169264U (ja) 1984-10-09 1984-10-09

Publications (1)

Publication Number Publication Date
JPS6169264U true JPS6169264U (ja) 1986-05-12

Family

ID=30711017

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15298084U Pending JPS6169264U (ja) 1984-10-09 1984-10-09

Country Status (1)

Country Link
JP (1) JPS6169264U (ja)

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