JPS6167537U - - Google Patents
Info
- Publication number
- JPS6167537U JPS6167537U JP15224484U JP15224484U JPS6167537U JP S6167537 U JPS6167537 U JP S6167537U JP 15224484 U JP15224484 U JP 15224484U JP 15224484 U JP15224484 U JP 15224484U JP S6167537 U JPS6167537 U JP S6167537U
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- sealed
- metal
- semiconductor element
- seal diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000007789 sealing Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第１図は本案による圧力センサーの一実施例の
断面図、第２図は現行品の液封止部の拡大断面図
、第３図は本案の液封止部の拡大断面図である。
１ａ…ハウジング、２…ガラスダイ、３…半導
体素子（チツプ）、４…金線、５…リードセン、
６…集積回路、７…カプラー、８ａ…ガラス封着
部、９…液注入口、１０ａ…封止用プラグ、１１
…シリコンオイル、１２…シールダイヤフラム、
１３…プレート、１４…パイプ、１５…メタルフ
ロー部。
FIG. 1 is a sectional view of an embodiment of the pressure sensor according to the present invention, FIG. 2 is an enlarged sectional view of the liquid sealing part of the current product, and FIG. 3 is an enlarged sectional view of the liquid sealing part of the present invention. 1a...Housing, 2...Glass die, 3...Semiconductor element (chip), 4...Gold wire, 5...Lead sensor,
6... Integrated circuit, 7... Coupler, 8a... Glass sealing part, 9... Liquid inlet, 10a... Sealing plug, 11
...Silicone oil, 12...Seal diaphragm,
13...Plate, 14...Pipe, 15...Metal flow section.
Claims (1)
ダイヤフラムで隔離し液体を封入してなる圧力測
定器において、該液体の封止を金属の塑性流動に
より封止することを特徴とする圧力測定器。 A pressure measuring device comprising a semiconductor element housed in a metal housing, separated by a seal diaphragm, and sealed with a liquid, characterized in that the liquid is sealed by plastic flow of the metal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15224484U JPS6167537U (en) | 1984-10-11 | 1984-10-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15224484U JPS6167537U (en) | 1984-10-11 | 1984-10-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6167537U true JPS6167537U (en) | 1986-05-09 |
Family
ID=30710314
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15224484U Pending JPS6167537U (en) | 1984-10-11 | 1984-10-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6167537U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6431U (en) * | 1987-06-18 | 1989-01-05 | ||
| JPH01209331A (en) * | 1988-02-17 | 1989-08-23 | Kurosaki Refract Co Ltd | Apparatus for measuring atmospheric pressure generated in construction |
| JP2013148350A (en) * | 2012-01-17 | 2013-08-01 | Fuji Koki Corp | Pressure sensor |
-
1984
- 1984-10-11 JP JP15224484U patent/JPS6167537U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6431U (en) * | 1987-06-18 | 1989-01-05 | ||
| JPH01209331A (en) * | 1988-02-17 | 1989-08-23 | Kurosaki Refract Co Ltd | Apparatus for measuring atmospheric pressure generated in construction |
| JP2013148350A (en) * | 2012-01-17 | 2013-08-01 | Fuji Koki Corp | Pressure sensor |
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