JPS6431U - - Google Patents
Info
- Publication number
- JPS6431U JPS6431U JP9351287U JP9351287U JPS6431U JP S6431 U JPS6431 U JP S6431U JP 9351287 U JP9351287 U JP 9351287U JP 9351287 U JP9351287 U JP 9351287U JP S6431 U JPS6431 U JP S6431U
- Authority
- JP
- Japan
- Prior art keywords
- container
- pressure sensor
- liquid
- wall surface
- inject
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 239000013013 elastic material Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Description
第１図は本考案実施例装置の断面図、第２図及
び第３図は第１図の装置を作成する途中の工程別
断面図である。
１，６……容器を構成するヘツダ及びキヤツプ
、３……センサ素子、６ａ……感圧用壁面、７…
…安定な液体、８……液体注入用パイプ、８ａ…
…液密的絞り部、９……弾性体。
FIG. 1 is a sectional view of an apparatus according to an embodiment of the present invention, and FIGS. 2 and 3 are sectional views showing each step in the process of manufacturing the apparatus of FIG. 1. 1, 6... Header and cap constituting the container, 3... Sensor element, 6a... Pressure sensitive wall surface, 7...
...Stable liquid, 8...Liquid injection pipe, 8a...
...Liquid-tight constriction section, 9...Elastic body.
Claims (1)
イヤフラム型圧力センサ素子を安定な液体と共に
密封した装置において、上記液体を注入するべく
、上記容器に設けたパイプが、弾性体が充填され
た状態で液密的に絞られていることを特徴とする
圧力センサ装置。 In a device in which a silicon diaphragm type pressure sensor element is sealed together with a stable liquid in a container with an extremely thin pressure-sensitive wall surface, a pipe provided in the container is filled with an elastic material to inject the liquid. A pressure sensor device characterized by being fluid-tightly squeezed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987093512U JPH0650749Y2 (en) | 1987-06-18 | 1987-06-18 | Pressure sensor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987093512U JPH0650749Y2 (en) | 1987-06-18 | 1987-06-18 | Pressure sensor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6431U true JPS6431U (en) | 1989-01-05 |
| JPH0650749Y2 JPH0650749Y2 (en) | 1994-12-21 |
Family
ID=30956150
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987093512U Expired - Lifetime JPH0650749Y2 (en) | 1987-06-18 | 1987-06-18 | Pressure sensor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0650749Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008232633A (en) * | 2007-03-16 | 2008-10-02 | Anritsu Corp | Fbg water pressure fluctuation measuring sensor |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6167537U (en) * | 1984-10-11 | 1986-05-09 | ||
| JPS61193351U (en) * | 1985-05-24 | 1986-12-02 |
-
1987
- 1987-06-18 JP JP1987093512U patent/JPH0650749Y2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6167537U (en) * | 1984-10-11 | 1986-05-09 | ||
| JPS61193351U (en) * | 1985-05-24 | 1986-12-02 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008232633A (en) * | 2007-03-16 | 2008-10-02 | Anritsu Corp | Fbg water pressure fluctuation measuring sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0650749Y2 (en) | 1994-12-21 |