JPS586246U - pressure transducer - Google Patents
pressure transducerInfo
- Publication number
- JPS586246U JPS586246U JP9950581U JP9950581U JPS586246U JP S586246 U JPS586246 U JP S586246U JP 9950581 U JP9950581 U JP 9950581U JP 9950581 U JP9950581 U JP 9950581U JP S586246 U JPS586246 U JP S586246U
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- pressure transducer
- gauge
- silicon
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来技術の構造断面図、第２図は本考案の構造
断面図、第３図は従来と本考案の特性比較図である。
１山ゲージ・チップ、２・・・ガラス・グイ、３・・・
圧力ポート、５・・・ケーシング、６・・・Ａｕ線、７
・・・端子、８・・・キャップ、９・・・圧力導入孔、
１１・・・シリコン働オイル、１２・・・シリコン・ラ
バー、１３・・・シール・パツキン。FIG. 1 is a cross-sectional view of the structure of the prior art, FIG. 2 is a cross-sectional view of the structure of the present invention, and FIG. 3 is a comparison diagram of the characteristics of the conventional technology and the present invention. 1. Gauge tip, 2.Glass gui, 3..
Pressure port, 5...Casing, 6...Au wire, 7
...Terminal, 8...Cap, 9...Pressure introduction hole,
11...Silicone working oil, 12...Silicone rubber, 13...Seal packing.
Claims (1)
するゲージを有するシリコンチップを用いた半導体圧力
センサにおいて、感圧部を有す、る前記シリコンゲージ
チップを支持する部材に設けられた圧力導入用の小孔お
よびそれに接続する圧力導入パイプの一部に、シリコン
オイル等の液体を充填したことを特徴とする半導体圧力
変換器。In a semiconductor pressure sensor using a silicon chip adhesively held on a glass die or the like and having a gauge that converts pressure into an electrical signal, a pressure introduction device provided in a member supporting the silicon gauge chip having a pressure sensitive part. A semiconductor pressure transducer characterized in that a small hole and a part of a pressure introduction pipe connected thereto are filled with a liquid such as silicone oil.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9950581U JPS586246U (en) | 1981-07-06 | 1981-07-06 | pressure transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9950581U JPS586246U (en) | 1981-07-06 | 1981-07-06 | pressure transducer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS586246U true JPS586246U (en) | 1983-01-14 |
Family
ID=29894242
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9950581U Pending JPS586246U (en) | 1981-07-06 | 1981-07-06 | pressure transducer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS586246U (en) |
-
1981
- 1981-07-06 JP JP9950581U patent/JPS586246U/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS586246U (en) | pressure transducer | |
| JPS5998340U (en) | semiconductor pressure transducer | |
| JPS59179352U (en) | semiconductor pressure sensor | |
| JPS613439U (en) | pressure transmitter | |
| JPS5952436U (en) | semiconductor pressure transducer | |
| JPS5837530U (en) | pressure detection device | |
| JPS6068446U (en) | Vacuum standard pressure transducer | |
| JPS5877444U (en) | absolute pressure transmitter | |
| JPS58138044U (en) | Temperature detection end with hermetic seal | |
| JPS6030554U (en) | semiconductor pressure sensor | |
| JPS59168142U (en) | semiconductor pressure sensor | |
| JPS59152433U (en) | semiconductor pressure sensor | |
| JPH0368036U (en) | ||
| JPS6375833U (en) | ||
| JPS6015644U (en) | pressure transducer | |
| JPS60125753U (en) | semiconductor pressure sensor | |
| JPS5883157U (en) | Resin-encapsulated semiconductor device | |
| JPS59113732U (en) | semiconductor pressure transducer | |
| JPS5839048U (en) | semiconductor equipment | |
| JPS5982829U (en) | pressure measuring device | |
| JPH0370336U (en) | ||
| JPS6370043U (en) | ||
| JPS60156433U (en) | Vacuum gauge measuring tube | |
| JPS59122540U (en) | Differential pressure detection device | |
| JPS6013486U (en) | contact sensor |