JPS59168142U - semiconductor pressure sensor - Google Patents
semiconductor pressure sensorInfo
- Publication number
- JPS59168142U JPS59168142U JP6260983U JP6260983U JPS59168142U JP S59168142 U JPS59168142 U JP S59168142U JP 6260983 U JP6260983 U JP 6260983U JP 6260983 U JP6260983 U JP 6260983U JP S59168142 U JPS59168142 U JP S59168142U
- Authority
- JP
- Japan
- Prior art keywords
- pressure sensor
- semiconductor pressure
- base
- pressure
- cap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来例を示す断面図、第２図および第３図は本
考案の実施例を示す断面図である。
１．１′・・・基台、２・・・センサペレット、′４・
・・パッケージ、５・・・圧力導入管。FIG. 1 is a sectional view showing a conventional example, and FIGS. 2 and 3 are sectional views showing an embodiment of the present invention. 1.1'... Base, 2... Sensor pellet, '4.
...Package, 5...Pressure introduction pipe.
Claims (1)
ラムが載置される基台と、該基台に固着され、上記グイ
ヤブーラムを包囲するキャップと、該キャップに設けら
れた圧力導入管と、から成り、上記圧力導入管は上記基
台とほぼ平行に設けられたことを特徴とする半導体圧力
センサ。Consisting of a silicon diaphragm equipped with a pressure-sensitive element, a base on which the diaphragm is placed, a cap that is fixed to the base and surrounds the guyabourum, and a pressure introduction pipe provided on the cap, A semiconductor pressure sensor characterized in that the pressure introduction pipe is provided substantially parallel to the base.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6260983U JPS59168142U (en) | 1983-04-25 | 1983-04-25 | semiconductor pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6260983U JPS59168142U (en) | 1983-04-25 | 1983-04-25 | semiconductor pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59168142U true JPS59168142U (en) | 1984-11-10 |
Family
ID=30192798
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6260983U Pending JPS59168142U (en) | 1983-04-25 | 1983-04-25 | semiconductor pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59168142U (en) |
-
1983
- 1983-04-25 JP JP6260983U patent/JPS59168142U/en active Pending
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