JPS60148946U - semiconductor pressure sensor - Google Patents
semiconductor pressure sensorInfo
- Publication number
- JPS60148946U JPS60148946U JP3619484U JP3619484U JPS60148946U JP S60148946 U JPS60148946 U JP S60148946U JP 3619484 U JP3619484 U JP 3619484U JP 3619484 U JP3619484 U JP 3619484U JP S60148946 U JPS60148946 U JP S60148946U
- Authority
- JP
- Japan
- Prior art keywords
- pressure sensor
- semiconductor pressure
- pressure
- sensor
- diaphragm portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図及び第２図は、夫々本考案の実施例を示□す断面
図、第３図は従来例を示す断面図である。
１・・・ヘッダ、３・・・ペレット、８・・・パッケー
ジ、１１・・・閉空間。1 and 2 are cross-sectional views showing an embodiment of the present invention, and FIG. 3 is a cross-sectional view showing a conventional example. 1...Header, 3...Pellet, 8...Package, 11...Closed space.
Claims (1)
ラム部を具備する半導体圧力センサにおいて、周囲温度
の上昇に比例する圧力を上記ダイヤフラム部に印加する
圧力印加手段を設けたことを特徴とする半導体圧力セン
サ。A semiconductor pressure sensor comprising a diaphragm portion on which a pressure-sensitive element having a piezoresistance effect is formed, characterized in that a pressure applying means is provided for applying a pressure proportional to an increase in ambient temperature to the diaphragm portion. sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3619484U JPS60148946U (en) | 1984-03-13 | 1984-03-13 | semiconductor pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3619484U JPS60148946U (en) | 1984-03-13 | 1984-03-13 | semiconductor pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60148946U true JPS60148946U (en) | 1985-10-03 |
Family
ID=30541146
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3619484U Pending JPS60148946U (en) | 1984-03-13 | 1984-03-13 | semiconductor pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60148946U (en) |
-
1984
- 1984-03-13 JP JP3619484U patent/JPS60148946U/en active Pending
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