JPS6166944U - - Google Patents
Info
- Publication number
- JPS6166944U JPS6166944U JP15207884U JP15207884U JPS6166944U JP S6166944 U JPS6166944 U JP S6166944U JP 15207884 U JP15207884 U JP 15207884U JP 15207884 U JP15207884 U JP 15207884U JP S6166944 U JPS6166944 U JP S6166944U
- Authority
- JP
- Japan
- Prior art keywords
- link
- drive mechanism
- link members
- chucks
- wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15207884U JPS6166944U (cs) | 1984-10-08 | 1984-10-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15207884U JPS6166944U (cs) | 1984-10-08 | 1984-10-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6166944U true JPS6166944U (cs) | 1986-05-08 |
Family
ID=30710162
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15207884U Pending JPS6166944U (cs) | 1984-10-08 | 1984-10-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6166944U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01315155A (ja) * | 1988-03-11 | 1989-12-20 | Tel Sagami Ltd | ウエハ移送装置 |
-
1984
- 1984-10-08 JP JP15207884U patent/JPS6166944U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01315155A (ja) * | 1988-03-11 | 1989-12-20 | Tel Sagami Ltd | ウエハ移送装置 |
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