JPS6166910A - 回転体の位置決め方法 - Google Patents
回転体の位置決め方法Info
- Publication number
- JPS6166910A JPS6166910A JP18885384A JP18885384A JPS6166910A JP S6166910 A JPS6166910 A JP S6166910A JP 18885384 A JP18885384 A JP 18885384A JP 18885384 A JP18885384 A JP 18885384A JP S6166910 A JPS6166910 A JP S6166910A
- Authority
- JP
- Japan
- Prior art keywords
- rotating body
- interference fringes
- positioning
- laser beam
- reference surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 22
- 230000001678 irradiating effect Effects 0.000 claims abstract description 6
- 230000003287 optical effect Effects 0.000 claims description 14
- 238000010586 diagram Methods 0.000 description 13
- 238000007689 inspection Methods 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18885384A JPS6166910A (ja) | 1984-09-11 | 1984-09-11 | 回転体の位置決め方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18885384A JPS6166910A (ja) | 1984-09-11 | 1984-09-11 | 回転体の位置決め方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6166910A true JPS6166910A (ja) | 1986-04-05 |
| JPH0410967B2 JPH0410967B2 (cs) | 1992-02-27 |
Family
ID=16230987
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18885384A Granted JPS6166910A (ja) | 1984-09-11 | 1984-09-11 | 回転体の位置決め方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6166910A (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106871823A (zh) * | 2017-04-07 | 2017-06-20 | 吉林大学 | 汽车车体转角视觉检测系统的检验装置 |
-
1984
- 1984-09-11 JP JP18885384A patent/JPS6166910A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106871823A (zh) * | 2017-04-07 | 2017-06-20 | 吉林大学 | 汽车车体转角视觉检测系统的检验装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0410967B2 (cs) | 1992-02-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR102433778B1 (ko) | 반도체 소자 검사 장치 및 검사 방법 | |
| CN110849899B (zh) | 检测系统及方法 | |
| JP5559840B2 (ja) | 画像センサのチルトを求めるための方法 | |
| KR20010053397A (ko) | 패턴화된 웨이퍼상의 결함을 픽셀을 기초로 검출하기 위한방법 및 장치 | |
| KR20130095211A (ko) | 얇은 디스크 형상물의 가장자리 프로파일을 비접촉으로 결정하기 위한 장치 | |
| CN103283002A (zh) | 检查装置、检查方法、曝光方法、以及半导体元件的制造方法 | |
| CN102473600A (zh) | 曝光条件设定方法及表面检查装置 | |
| JPH1096611A (ja) | 形状測定装置 | |
| JP2002286507A (ja) | 光学式エンコーダ装置 | |
| JPS6166910A (ja) | 回転体の位置決め方法 | |
| US9453725B2 (en) | Method and apparatus for quantitative measurement of surface accuracy of an area | |
| JP3049144B2 (ja) | 粒度分布測定装置 | |
| JPH11243129A (ja) | 半導体ウエハ位置検出装置 | |
| JP4853968B2 (ja) | ウェハの位置決め方法および位置決め装置 | |
| JPH0124251B2 (cs) | ||
| JP2021167845A (ja) | 表面異物検出装置およびそれを用いた表面異物検出方法 | |
| JPH10227626A (ja) | 光学式表面粗さ計測装置 | |
| JP4135133B2 (ja) | 光軸補正装置及び光学機器システム | |
| JP2574720Y2 (ja) | 傷検査用光学装置の位置調整装置 | |
| JPH0783620A (ja) | レーザ変位計 | |
| JPH09269277A (ja) | レンズの偏心計測装置 | |
| KR960015053B1 (ko) | 평면도 측정장치 | |
| JPS59100835A (ja) | 集束性光学系の焦点距離測定方法および装置 | |
| CN112902838A (zh) | 一种零位传感器及检测系统 | |
| KR900005642B1 (ko) | 광파이버 구조 및 외경측정의 장치 및 방법 |