JPS6165480A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS6165480A
JPS6165480A JP59188442A JP18844284A JPS6165480A JP S6165480 A JPS6165480 A JP S6165480A JP 59188442 A JP59188442 A JP 59188442A JP 18844284 A JP18844284 A JP 18844284A JP S6165480 A JPS6165480 A JP S6165480A
Authority
JP
Japan
Prior art keywords
layer
gate electrode
compound layer
etching
conductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59188442A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0329303B2 (enrdf_load_stackoverflow
Inventor
Shigeru Kuroda
黒田　滋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP59188442A priority Critical patent/JPS6165480A/ja
Publication of JPS6165480A publication Critical patent/JPS6165480A/ja
Publication of JPH0329303B2 publication Critical patent/JPH0329303B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/27—Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
    • H10D64/311—Gate electrodes for field-effect devices
    • H10D64/411—Gate electrodes for field-effect devices for FETs

Landscapes

  • Weting (AREA)
  • Junction Field-Effect Transistors (AREA)
JP59188442A 1984-09-07 1984-09-07 半導体装置の製造方法 Granted JPS6165480A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59188442A JPS6165480A (ja) 1984-09-07 1984-09-07 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59188442A JPS6165480A (ja) 1984-09-07 1984-09-07 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS6165480A true JPS6165480A (ja) 1986-04-04
JPH0329303B2 JPH0329303B2 (enrdf_load_stackoverflow) 1991-04-23

Family

ID=16223750

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59188442A Granted JPS6165480A (ja) 1984-09-07 1984-09-07 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6165480A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63222462A (ja) * 1987-03-12 1988-09-16 Fujitsu Ltd 半導体装置及びその製造方法
JP2006278813A (ja) * 2005-03-30 2006-10-12 Eudyna Devices Inc スイッチ回路並びに半導体装置及びその製造方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51105148A (en) * 1974-12-18 1976-09-17 Atomenergi Ab Tairyudanbosochi oyobi sonoseizohoho
JPS5222707B2 (enrdf_load_stackoverflow) * 1973-06-08 1977-06-18
JPS54130649U (enrdf_load_stackoverflow) * 1978-03-03 1979-09-11
JPS57175887A (en) * 1981-04-24 1982-10-28 Toshiba Corp Heat exchanger

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5222707B2 (enrdf_load_stackoverflow) * 1973-06-08 1977-06-18
JPS51105148A (en) * 1974-12-18 1976-09-17 Atomenergi Ab Tairyudanbosochi oyobi sonoseizohoho
JPS54130649U (enrdf_load_stackoverflow) * 1978-03-03 1979-09-11
JPS57175887A (en) * 1981-04-24 1982-10-28 Toshiba Corp Heat exchanger

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63222462A (ja) * 1987-03-12 1988-09-16 Fujitsu Ltd 半導体装置及びその製造方法
JP2006278813A (ja) * 2005-03-30 2006-10-12 Eudyna Devices Inc スイッチ回路並びに半導体装置及びその製造方法

Also Published As

Publication number Publication date
JPH0329303B2 (enrdf_load_stackoverflow) 1991-04-23

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term