JPS6163516A - 高純度モノシランの貯蔵方法 - Google Patents

高純度モノシランの貯蔵方法

Info

Publication number
JPS6163516A
JPS6163516A JP18277484A JP18277484A JPS6163516A JP S6163516 A JPS6163516 A JP S6163516A JP 18277484 A JP18277484 A JP 18277484A JP 18277484 A JP18277484 A JP 18277484A JP S6163516 A JPS6163516 A JP S6163516A
Authority
JP
Japan
Prior art keywords
monosilane
storage tank
hydrogen
liquid
nitrogen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18277484A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0443844B2 (enrdf_load_stackoverflow
Inventor
Atsuhiko Hiai
日合　淳彦
Kazuo Wakimura
脇村　和生
Masao Tanaka
田中　将夫
Nobuhiro Fukuda
福田　信弘
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP18277484A priority Critical patent/JPS6163516A/ja
Publication of JPS6163516A publication Critical patent/JPS6163516A/ja
Publication of JPH0443844B2 publication Critical patent/JPH0443844B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
JP18277484A 1984-09-03 1984-09-03 高純度モノシランの貯蔵方法 Granted JPS6163516A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18277484A JPS6163516A (ja) 1984-09-03 1984-09-03 高純度モノシランの貯蔵方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18277484A JPS6163516A (ja) 1984-09-03 1984-09-03 高純度モノシランの貯蔵方法

Publications (2)

Publication Number Publication Date
JPS6163516A true JPS6163516A (ja) 1986-04-01
JPH0443844B2 JPH0443844B2 (enrdf_load_stackoverflow) 1992-07-17

Family

ID=16124181

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18277484A Granted JPS6163516A (ja) 1984-09-03 1984-09-03 高純度モノシランの貯蔵方法

Country Status (1)

Country Link
JP (1) JPS6163516A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0443844B2 (enrdf_load_stackoverflow) 1992-07-17

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term