JPH0443845B2 - - Google Patents

Info

Publication number
JPH0443845B2
JPH0443845B2 JP59182775A JP18277584A JPH0443845B2 JP H0443845 B2 JPH0443845 B2 JP H0443845B2 JP 59182775 A JP59182775 A JP 59182775A JP 18277584 A JP18277584 A JP 18277584A JP H0443845 B2 JPH0443845 B2 JP H0443845B2
Authority
JP
Japan
Prior art keywords
monosilane
nitrogen
oxygen
present
argon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59182775A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6163517A (ja
Inventor
Atsuhiko Hiai
Kazuo Wakimura
Masao Tanaka
Nobuhiro Fukuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP18277584A priority Critical patent/JPS6163517A/ja
Publication of JPS6163517A publication Critical patent/JPS6163517A/ja
Publication of JPH0443845B2 publication Critical patent/JPH0443845B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
JP18277584A 1984-09-03 1984-09-03 モノシランの精製方法 Granted JPS6163517A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18277584A JPS6163517A (ja) 1984-09-03 1984-09-03 モノシランの精製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18277584A JPS6163517A (ja) 1984-09-03 1984-09-03 モノシランの精製方法

Publications (2)

Publication Number Publication Date
JPS6163517A JPS6163517A (ja) 1986-04-01
JPH0443845B2 true JPH0443845B2 (enrdf_load_stackoverflow) 1992-07-17

Family

ID=16124198

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18277584A Granted JPS6163517A (ja) 1984-09-03 1984-09-03 モノシランの精製方法

Country Status (1)

Country Link
JP (1) JPS6163517A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6163517A (ja) 1986-04-01

Similar Documents

Publication Publication Date Title
EP3590888B1 (en) Apparatus and method for the condensed phase production of trisilylamine
EP0334664B1 (en) Recovery of lower-boiling silanes in a cvd process
US4112057A (en) Process for purifying halogenosilanes
RU2368568C2 (ru) Способ получения кремния
WO2013119902A1 (en) Liquid phase synthesis of trisilylamine
US20170158518A1 (en) Cyclohexasilane and method for producing the same
US8404205B2 (en) Apparatus and method for producing polycrystalline silicon having a reduced amount of boron compounds by forming phosphorus-boron compounds
US20040042949A1 (en) Method for removing aluminum from chlorosilanes
JPH0443845B2 (enrdf_load_stackoverflow)
JPH0443844B2 (enrdf_load_stackoverflow)
JPH0459518B2 (enrdf_load_stackoverflow)
US8518352B2 (en) Apparatus and method for producing polycrystalline silicon having a reduced amount of boron compounds by venting the system with an inert gas
JP5657493B2 (ja) ホウ素化合物の不純物を減じたトリクロロシラン製造方法
CN214270230U (zh) 一种氯硅烷络合除铝的装备
JPH02196014A (ja) 高純度ジクロロシランの製造方法
US2931709A (en) Decarburizing silicon tetrachloride
JPH1111905A (ja) 気体の、メタン含有塩化水素を浄化する方法および該塩化水素の使用
JPH0436090B2 (enrdf_load_stackoverflow)
JPH04231317A (ja) ジクロルシランの精製方法
CN223069100U (zh) 一种降低多晶硅中施、受主杂质的氯硅烷原料提纯系统
JP7534652B2 (ja) 六フッ化タングステンの製造方法および精製方法
RU2174950C1 (ru) Способ получения силана
JP2003128412A (ja) 四弗化ケイ素の精製方法
JP2001048519A (ja) フルオロシランガスの精製方法
JP2536360B2 (ja) クロルシラン類の精製方法

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term