JPS6163516A - 高純度モノシランの貯蔵方法 - Google Patents

高純度モノシランの貯蔵方法

Info

Publication number
JPS6163516A
JPS6163516A JP18277484A JP18277484A JPS6163516A JP S6163516 A JPS6163516 A JP S6163516A JP 18277484 A JP18277484 A JP 18277484A JP 18277484 A JP18277484 A JP 18277484A JP S6163516 A JPS6163516 A JP S6163516A
Authority
JP
Japan
Prior art keywords
monosilane
storage tank
purity
hydrogen
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18277484A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0443844B2 (de
Inventor
Atsuhiko Hiai
日合　淳彦
Kazuo Wakimura
脇村　和生
Masao Tanaka
田中　将夫
Nobuhiro Fukuda
福田　信弘
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP18277484A priority Critical patent/JPS6163516A/ja
Publication of JPS6163516A publication Critical patent/JPS6163516A/ja
Publication of JPH0443844B2 publication Critical patent/JPH0443844B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
JP18277484A 1984-09-03 1984-09-03 高純度モノシランの貯蔵方法 Granted JPS6163516A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18277484A JPS6163516A (ja) 1984-09-03 1984-09-03 高純度モノシランの貯蔵方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18277484A JPS6163516A (ja) 1984-09-03 1984-09-03 高純度モノシランの貯蔵方法

Publications (2)

Publication Number Publication Date
JPS6163516A true JPS6163516A (ja) 1986-04-01
JPH0443844B2 JPH0443844B2 (de) 1992-07-17

Family

ID=16124181

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18277484A Granted JPS6163516A (ja) 1984-09-03 1984-09-03 高純度モノシランの貯蔵方法

Country Status (1)

Country Link
JP (1) JPS6163516A (de)

Also Published As

Publication number Publication date
JPH0443844B2 (de) 1992-07-17

Similar Documents

Publication Publication Date Title
US5118485A (en) Recovery of lower-boiling silanes in a cvd process
RU2368568C2 (ru) Способ получения кремния
US7790132B2 (en) Method for producing trichlorosilane and method for producing polycrystalline silicon
CA2851242A1 (en) Apparatus and method for the condensed phase production of trisilylamine
EP2812279A1 (de) Flüssigphasensynthese von trisilylamin
KR20010042581A (ko) 디보란의 제조 및 정제
JPS6163516A (ja) 高純度モノシランの貯蔵方法
TW460626B (en) A process for producing high-purity nitrogen trifluoride gas
JPS6163517A (ja) モノシランの精製方法
JPH05178768A (ja) １，１，１，２−テトラフルオロエタンとフッ化水素の分離方法
JPS6162699A (ja) 高純度モノシランの容器充填方法
JPH02196014A (ja) 高純度ジクロロシランの製造方法
JPH11217673A (ja) 窒化膜の製造方法
JPH1111905A (ja) 気体の、メタン含有塩化水素を浄化する方法および該塩化水素の使用
US2931709A (en) Decarburizing silicon tetrachloride
JP2000072438A (ja) 四弗化ゲルマニウムの精製方法
JPH04231317A (ja) ジクロルシランの精製方法
JPH11335310A (ja) 精製アルコキシド及びアルコキシドの精製方法
JPS6163515A (ja) モノシランの製造方法
JP2003128412A (ja) 四弗化ケイ素の精製方法
JP2001072687A (ja) 精製アミド及びアミドの精製方法
JPH06239610A (ja) フルオロシラン
CA1151395A (en) High purity silane and silicone production
JPS60127214A (ja) ジシランの製造方法
JP2001048519A (ja) フルオロシランガスの精製方法

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term