JPS6161360A - 電子顕微鏡における明るさ制御方法 - Google Patents

電子顕微鏡における明るさ制御方法

Info

Publication number
JPS6161360A
JPS6161360A JP59182322A JP18232284A JPS6161360A JP S6161360 A JPS6161360 A JP S6161360A JP 59182322 A JP59182322 A JP 59182322A JP 18232284 A JP18232284 A JP 18232284A JP S6161360 A JPS6161360 A JP S6161360A
Authority
JP
Japan
Prior art keywords
brightness
excitation
lens system
fluorescent screen
initial value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59182322A
Other languages
English (en)
Japanese (ja)
Other versions
JPH051585B2 (enrdf_load_stackoverflow
Inventor
Keisuke Suzuki
啓介 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP59182322A priority Critical patent/JPS6161360A/ja
Publication of JPS6161360A publication Critical patent/JPS6161360A/ja
Publication of JPH051585B2 publication Critical patent/JPH051585B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP59182322A 1984-08-31 1984-08-31 電子顕微鏡における明るさ制御方法 Granted JPS6161360A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59182322A JPS6161360A (ja) 1984-08-31 1984-08-31 電子顕微鏡における明るさ制御方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59182322A JPS6161360A (ja) 1984-08-31 1984-08-31 電子顕微鏡における明るさ制御方法

Publications (2)

Publication Number Publication Date
JPS6161360A true JPS6161360A (ja) 1986-03-29
JPH051585B2 JPH051585B2 (enrdf_load_stackoverflow) 1993-01-08

Family

ID=16116279

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59182322A Granted JPS6161360A (ja) 1984-08-31 1984-08-31 電子顕微鏡における明るさ制御方法

Country Status (1)

Country Link
JP (1) JPS6161360A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0218846A (ja) * 1988-07-05 1990-01-23 Jeol Ltd 透過電子顕微鏡の明るさ制御装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5221763A (en) * 1975-08-13 1977-02-18 Hitachi Ltd Electronic microscope

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5221763A (en) * 1975-08-13 1977-02-18 Hitachi Ltd Electronic microscope

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0218846A (ja) * 1988-07-05 1990-01-23 Jeol Ltd 透過電子顕微鏡の明るさ制御装置

Also Published As

Publication number Publication date
JPH051585B2 (enrdf_load_stackoverflow) 1993-01-08

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term