JPS6161101B2 - - Google Patents
Info
- Publication number
- JPS6161101B2 JPS6161101B2 JP595878A JP595878A JPS6161101B2 JP S6161101 B2 JPS6161101 B2 JP S6161101B2 JP 595878 A JP595878 A JP 595878A JP 595878 A JP595878 A JP 595878A JP S6161101 B2 JPS6161101 B2 JP S6161101B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- electrophotographic photoreceptor
- gas
- photoconductive layer
- photoconductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 88
- 108091008695 photoreceptors Proteins 0.000 claims description 83
- 239000007789 gas Substances 0.000 claims description 62
- 238000000034 method Methods 0.000 claims description 44
- 238000004519 manufacturing process Methods 0.000 claims description 31
- 230000015572 biosynthetic process Effects 0.000 claims description 17
- 239000012535 impurity Substances 0.000 claims description 16
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 6
- 229910052739 hydrogen Inorganic materials 0.000 claims description 5
- 239000001257 hydrogen Substances 0.000 claims description 5
- 150000003377 silicon compounds Chemical class 0.000 claims description 5
- 239000011261 inert gas Substances 0.000 claims 2
- 239000010410 layer Substances 0.000 description 174
- 239000000463 material Substances 0.000 description 33
- 239000000758 substrate Substances 0.000 description 31
- 238000000151 deposition Methods 0.000 description 28
- 230000008021 deposition Effects 0.000 description 28
- 208000028659 discharge Diseases 0.000 description 23
- 239000002345 surface coating layer Substances 0.000 description 19
- 238000002156 mixing Methods 0.000 description 17
- 229910052782 aluminium Inorganic materials 0.000 description 14
- 238000004140 cleaning Methods 0.000 description 13
- 239000000123 paper Substances 0.000 description 13
- 238000012546 transfer Methods 0.000 description 12
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 10
- 239000011230 binding agent Substances 0.000 description 10
- 230000003287 optical effect Effects 0.000 description 10
- 230000008569 process Effects 0.000 description 10
- 206010034972 Photosensitivity reaction Diseases 0.000 description 9
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 9
- 230000036211 photosensitivity Effects 0.000 description 9
- -1 polyethylene terephthalate Polymers 0.000 description 9
- 238000011282 treatment Methods 0.000 description 9
- 238000011161 development Methods 0.000 description 8
- 239000002904 solvent Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 230000035945 sensitivity Effects 0.000 description 7
- 230000003595 spectral effect Effects 0.000 description 7
- 239000000243 solution Substances 0.000 description 6
- 229910052785 arsenic Inorganic materials 0.000 description 5
- 230000008901 benefit Effects 0.000 description 5
- 238000002425 crystallisation Methods 0.000 description 5
- 230000008025 crystallization Effects 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 238000001771 vacuum deposition Methods 0.000 description 5
- 238000005299 abrasion Methods 0.000 description 4
- 230000002411 adverse Effects 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 230000000737 periodic effect Effects 0.000 description 4
- 229920003227 poly(N-vinyl carbazole) Polymers 0.000 description 4
- 239000011241 protective layer Substances 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920003002 synthetic resin Polymers 0.000 description 4
- 239000000057 synthetic resin Substances 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 229920000915 polyvinyl chloride Polymers 0.000 description 3
- 239000004800 polyvinyl chloride Substances 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- 229910052714 tellurium Inorganic materials 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000004952 Polyamide Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- 239000004793 Polystyrene Substances 0.000 description 2
- 229920001328 Polyvinylidene chloride Polymers 0.000 description 2
- 229920006311 Urethane elastomer Polymers 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 229910052787 antimony Inorganic materials 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 229920002678 cellulose Polymers 0.000 description 2
- 239000001913 cellulose Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 229920001577 copolymer Polymers 0.000 description 2
- 229910021419 crystalline silicon Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010790 dilution Methods 0.000 description 2
- 239000012895 dilution Substances 0.000 description 2
- 239000000284 extract Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 230000009931 harmful effect Effects 0.000 description 2
- 150000004678 hydrides Chemical class 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000001939 inductive effect Effects 0.000 description 2
- 229910052741 iridium Inorganic materials 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229920002647 polyamide Polymers 0.000 description 2
- 229920000515 polycarbonate Polymers 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 229920002223 polystyrene Polymers 0.000 description 2
- 239000005033 polyvinylidene chloride Substances 0.000 description 2
- 238000012827 research and development Methods 0.000 description 2
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- BQCIDUSAKPWEOX-UHFFFAOYSA-N 1,1-Difluoroethene Chemical compound FC(F)=C BQCIDUSAKPWEOX-UHFFFAOYSA-N 0.000 description 1
- FKNIDKXOANSRCS-UHFFFAOYSA-N 2,3,4-trinitrofluoren-1-one Chemical compound C1=CC=C2C3=C([N+](=O)[O-])C([N+]([O-])=O)=C([N+]([O-])=O)C(=O)C3=CC2=C1 FKNIDKXOANSRCS-UHFFFAOYSA-N 0.000 description 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910016569 AlF 3 Inorganic materials 0.000 description 1
- 229920002284 Cellulose triacetate Polymers 0.000 description 1
- 239000004640 Melamine resin Substances 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- 239000002033 PVDF binder Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 206010047571 Visual impairment Diseases 0.000 description 1
- NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- 230000000711 cancerogenic effect Effects 0.000 description 1
- 231100000315 carcinogenic Toxicity 0.000 description 1
- 229920002301 cellulose acetate Polymers 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000002925 chemical effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 239000003085 diluting agent Substances 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000005007 epoxy-phenolic resin Substances 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 229910001506 inorganic fluoride Inorganic materials 0.000 description 1
- 229910052809 inorganic oxide Inorganic materials 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 229920006122 polyamide resin Polymers 0.000 description 1
- 229920001083 polybutene Polymers 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 229920002620 polyvinyl fluoride Polymers 0.000 description 1
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052716 thallium Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- ILJSQTXMGCGYMG-UHFFFAOYSA-N triacetic acid Chemical compound CC(=O)CC(=O)CC(O)=O ILJSQTXMGCGYMG-UHFFFAOYSA-N 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Landscapes
- Photoreceptors In Electrophotography (AREA)
Priority Applications (21)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP595878A JPS5499441A (en) | 1978-01-23 | 1978-01-23 | Production of electrophotographic photoreceptor |
AU42715/78A AU530905B2 (en) | 1977-12-22 | 1978-12-19 | Electrophotographic photosensitive member |
US05/971,114 US4265991A (en) | 1977-12-22 | 1978-12-19 | Electrophotographic photosensitive member and process for production thereof |
FR7836015A FR2412874A1 (fr) | 1977-12-22 | 1978-12-21 | Organe photosensible pour operation electrophotographique et son procede de realisation |
CA000318403A CA1166505A (en) | 1977-12-22 | 1978-12-21 | Electrophotographic photosensitive layer including amorphous silicon containing hydrogen |
GB7849872A GB2013725B (en) | 1977-12-22 | 1978-12-22 | Electrophotographic photosensitive member and process for production thereof |
DE2855718A DE2855718C3 (de) | 1977-12-22 | 1978-12-22 | Elektrophotographisches Aufzeichnungsmaterial und Verfahren zu dessen Herstellung |
GB08218177A GB2102028B (en) | 1977-12-22 | 1978-12-22 | Electrophotographic photosensitive member and process for production thereof |
GB08218178A GB2100759B (en) | 1977-12-22 | 1978-12-22 | Electrophotographic photosensitive member and process for production thereof |
US06/214,045 US4451547A (en) | 1977-12-22 | 1980-12-08 | Electrophotographic α-Si(H) member and process for production thereof |
FR8119504A FR2487535B1 (enrdf_load_stackoverflow) | 1977-12-22 | 1981-10-16 | |
US06/581,435 US4507375A (en) | 1977-12-22 | 1984-02-17 | Electrophotographic photosensitive member and process for production thereof |
US06/695,428 US4552824A (en) | 1977-12-22 | 1985-01-28 | Electrophotographic photosensitive member and process for production thereof |
HK427/88A HK42788A (en) | 1977-12-22 | 1988-06-09 | Electrophotographic photosensitive member and process for production thereof |
HK425/88A HK42588A (en) | 1977-12-22 | 1988-06-09 | Electrophotographic photosensitive member and process for production thereof |
HK424/88A HK42488A (en) | 1977-12-22 | 1988-06-09 | Electrophotographic photosensitive member and process for production thereof |
US08/448,123 US5585149A (en) | 1977-12-22 | 1995-05-23 | CVD method for forming a photoconductive hydrogenated a-Si layer |
US08/483,154 US5658703A (en) | 1977-12-22 | 1995-06-07 | Electrophotographic photosensitive member and process for production thereof |
US08/487,561 US5576060A (en) | 1977-12-22 | 1995-06-07 | CVD process of forming hydrogenated a-Si films |
US08/487,560 US5640663A (en) | 1977-12-22 | 1995-06-07 | Electrophotographic method using a cleaning blade to remove residual toner |
US08/484,910 US5756250A (en) | 1977-12-22 | 1995-06-07 | Electrophotographic method using a cleaning blade to remove residual toner |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP595878A JPS5499441A (en) | 1978-01-23 | 1978-01-23 | Production of electrophotographic photoreceptor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5499441A JPS5499441A (en) | 1979-08-06 |
JPS6161101B2 true JPS6161101B2 (enrdf_load_stackoverflow) | 1986-12-24 |
Family
ID=11625391
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP595878A Granted JPS5499441A (en) | 1977-12-22 | 1978-01-23 | Production of electrophotographic photoreceptor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5499441A (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4501766A (en) * | 1982-02-03 | 1985-02-26 | Tokyo Shibaura Denki Kabushiki Kaisha | Film depositing apparatus and a film depositing method |
-
1978
- 1978-01-23 JP JP595878A patent/JPS5499441A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5499441A (en) | 1979-08-06 |