JPS6159839A - エツチング液 - Google Patents

エツチング液

Info

Publication number
JPS6159839A
JPS6159839A JP59182113A JP18211384A JPS6159839A JP S6159839 A JPS6159839 A JP S6159839A JP 59182113 A JP59182113 A JP 59182113A JP 18211384 A JP18211384 A JP 18211384A JP S6159839 A JPS6159839 A JP S6159839A
Authority
JP
Japan
Prior art keywords
etching
inp
ingaasp
plane
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59182113A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0256810B2 (enExample
Inventor
Masayuki Yamaguchi
山口　昌幸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP59182113A priority Critical patent/JPS6159839A/ja
Publication of JPS6159839A publication Critical patent/JPS6159839A/ja
Publication of JPH0256810B2 publication Critical patent/JPH0256810B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P50/646—

Landscapes

  • Weting (AREA)
JP59182113A 1984-08-31 1984-08-31 エツチング液 Granted JPS6159839A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59182113A JPS6159839A (ja) 1984-08-31 1984-08-31 エツチング液

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59182113A JPS6159839A (ja) 1984-08-31 1984-08-31 エツチング液

Publications (2)

Publication Number Publication Date
JPS6159839A true JPS6159839A (ja) 1986-03-27
JPH0256810B2 JPH0256810B2 (enExample) 1990-12-03

Family

ID=16112557

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59182113A Granted JPS6159839A (ja) 1984-08-31 1984-08-31 エツチング液

Country Status (1)

Country Link
JP (1) JPS6159839A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5296719A (en) * 1991-07-22 1994-03-22 Matsushita Electric Industrial Co., Ltd. Quantum device and fabrication method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5296719A (en) * 1991-07-22 1994-03-22 Matsushita Electric Industrial Co., Ltd. Quantum device and fabrication method thereof

Also Published As

Publication number Publication date
JPH0256810B2 (enExample) 1990-12-03

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term