JPS6158972B2 - - Google Patents

Info

Publication number
JPS6158972B2
JPS6158972B2 JP56119313A JP11931381A JPS6158972B2 JP S6158972 B2 JPS6158972 B2 JP S6158972B2 JP 56119313 A JP56119313 A JP 56119313A JP 11931381 A JP11931381 A JP 11931381A JP S6158972 B2 JPS6158972 B2 JP S6158972B2
Authority
JP
Japan
Prior art keywords
nitride
thin film
substrate
aln
metal melt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56119313A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5821818A (ja
Inventor
Masasue Okajima
Haruki Kurihara
Katsutoshi Yoneya
Seizo Doi
Hiroshi Yamaguchi
Hideyo Kagami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP56119313A priority Critical patent/JPS5821818A/ja
Publication of JPS5821818A publication Critical patent/JPS5821818A/ja
Publication of JPS6158972B2 publication Critical patent/JPS6158972B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
    • H10P14/203—
    • H10P14/3202—
    • H10P14/3416—

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Formation Of Insulating Films (AREA)
JP56119313A 1981-07-31 1981-07-31 窒化アルミニウム薄膜の製造方法 Granted JPS5821818A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56119313A JPS5821818A (ja) 1981-07-31 1981-07-31 窒化アルミニウム薄膜の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56119313A JPS5821818A (ja) 1981-07-31 1981-07-31 窒化アルミニウム薄膜の製造方法

Publications (2)

Publication Number Publication Date
JPS5821818A JPS5821818A (ja) 1983-02-08
JPS6158972B2 true JPS6158972B2 (OSRAM) 1986-12-13

Family

ID=14758343

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56119313A Granted JPS5821818A (ja) 1981-07-31 1981-07-31 窒化アルミニウム薄膜の製造方法

Country Status (1)

Country Link
JP (1) JPS5821818A (OSRAM)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60143680A (ja) * 1983-12-29 1985-07-29 Sanyo Electric Co Ltd Ｍｉｓ型発光ダイオ−ド
JP7106108B2 (ja) * 2018-07-20 2022-07-26 国立大学法人東北大学 窒化アルミニウム結晶の製造方法

Also Published As

Publication number Publication date
JPS5821818A (ja) 1983-02-08

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