JPS6157908B2 - - Google Patents
Info
- Publication number
- JPS6157908B2 JPS6157908B2 JP57119551A JP11955182A JPS6157908B2 JP S6157908 B2 JPS6157908 B2 JP S6157908B2 JP 57119551 A JP57119551 A JP 57119551A JP 11955182 A JP11955182 A JP 11955182A JP S6157908 B2 JPS6157908 B2 JP S6157908B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- film
- work roll
- sputtering
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 56
- 239000010409 thin film Substances 0.000 claims description 41
- 238000004544 sputter deposition Methods 0.000 claims description 27
- 230000002093 peripheral effect Effects 0.000 claims description 10
- 230000007246 mechanism Effects 0.000 claims description 6
- 239000010410 layer Substances 0.000 description 21
- 239000007788 liquid Substances 0.000 description 7
- 229910000889 permalloy Inorganic materials 0.000 description 7
- 230000007423 decrease Effects 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 239000012535 impurity Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- OQCFWECOQNPQCG-UHFFFAOYSA-N 1,3,4,8-tetrahydropyrimido[4,5-c]oxazin-7-one Chemical compound C1CONC2=C1C=NC(=O)N2 OQCFWECOQNPQCG-UHFFFAOYSA-N 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 238000004804 winding Methods 0.000 description 3
- 229910000599 Cr alloy Inorganic materials 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 239000002923 metal particle Substances 0.000 description 2
- 229910001111 Fine metal Inorganic materials 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 238000007781 pre-processing Methods 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11955182A JPS5913072A (ja) | 1982-07-09 | 1982-07-09 | スパツタリング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11955182A JPS5913072A (ja) | 1982-07-09 | 1982-07-09 | スパツタリング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5913072A JPS5913072A (ja) | 1984-01-23 |
| JPS6157908B2 true JPS6157908B2 (zh) | 1986-12-09 |
Family
ID=14764106
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11955182A Granted JPS5913072A (ja) | 1982-07-09 | 1982-07-09 | スパツタリング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5913072A (zh) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE69837516T2 (de) | 1997-11-14 | 2007-12-27 | Murata Mfg. Co., Ltd., Nagaokakyo | Vielschichtkondensator |
| JP2008007790A (ja) * | 2006-06-27 | 2008-01-17 | Sumitomo Metal Mining Co Ltd | 巻取式複合真空表面処理装置及びフィルムの表面処理方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57119548A (en) * | 1980-12-01 | 1982-07-26 | Philips Nv | Conference telephone system |
-
1982
- 1982-07-09 JP JP11955182A patent/JPS5913072A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57119548A (en) * | 1980-12-01 | 1982-07-26 | Philips Nv | Conference telephone system |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5913072A (ja) | 1984-01-23 |
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