JPS6157572B2 - - Google Patents

Info

Publication number

JPS6157572B2

JPS6157572B2 JP12491179A JP12491179A JPS6157572B2 JP S6157572 B2 JPS6157572 B2 JP S6157572B2 JP 12491179 A JP12491179 A JP 12491179A JP 12491179 A JP12491179 A JP 12491179A JP S6157572 B2 JPS6157572 B2 JP S6157572B2

Authority

JP

Japan

Prior art keywords

iron oxide

oxide

indium oxide

gas

resistance value

Prior art date

1979-09-27

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

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• UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical group [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 claims description 47
• 229910003437 indium oxide Inorganic materials 0.000 claims description 24
• PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical group [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 24
• 238000001514 detection method Methods 0.000 claims description 19
• 239000004480 active ingredient Substances 0.000 claims description 11
• XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 7
• NNPPMTNAJDCUHE-UHFFFAOYSA-N isobutane Chemical compound CC(C)C NNPPMTNAJDCUHE-UHFFFAOYSA-N 0.000 description 12
• 239000002994 raw material Substances 0.000 description 8
• 230000035945 sensitivity Effects 0.000 description 7
• 239000001282 iso-butane Substances 0.000 description 6
• 239000000654 additive Substances 0.000 description 4
• 230000000052 comparative effect Effects 0.000 description 3
• 230000000694 effects Effects 0.000 description 3
• 238000010304 firing Methods 0.000 description 3
• 238000004519 manufacturing process Methods 0.000 description 3
• 239000004065 semiconductor Substances 0.000 description 3
• 238000000926 separation method Methods 0.000 description 3
• 229910000859 α-Fe Inorganic materials 0.000 description 3
• 230000000996 additive effect Effects 0.000 description 2
• 230000001747 exhibiting effect Effects 0.000 description 2
• 239000000463 material Substances 0.000 description 2
• 239000007858 starting material Substances 0.000 description 2
• 239000004606 Fillers/Extenders Substances 0.000 description 1
• 229910021617 Indium monochloride Inorganic materials 0.000 description 1
• 229910006404 SnO 2 Inorganic materials 0.000 description 1
• XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
• 229910001566 austenite Inorganic materials 0.000 description 1
• 239000011230 binding agent Substances 0.000 description 1
• 238000013461 design Methods 0.000 description 1
• 230000007613 environmental effect Effects 0.000 description 1
• 238000002474 experimental method Methods 0.000 description 1
• 239000010408 film Substances 0.000 description 1
• 229910052738 indium Inorganic materials 0.000 description 1
• APHGZSBLRQFRCA-UHFFFAOYSA-M indium(1+);chloride Chemical compound [In]Cl APHGZSBLRQFRCA-UHFFFAOYSA-M 0.000 description 1
• 239000000543 intermediate Substances 0.000 description 1
• 238000011835 investigation Methods 0.000 description 1
• 238000000034 method Methods 0.000 description 1
• 239000000203 mixture Substances 0.000 description 1
• BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 1
• 239000000843 powder Substances 0.000 description 1
• 238000012545 processing Methods 0.000 description 1
• 238000011160 research Methods 0.000 description 1
• 229910001220 stainless steel Inorganic materials 0.000 description 1
• 239000010409 thin film Substances 0.000 description 1
• XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
• 229910001887 tin oxide Inorganic materials 0.000 description 1