JPS6155938A - 電子素子の分離法 - Google Patents

電子素子の分離法

Info

Publication number
JPS6155938A
JPS6155938A JP59177803A JP17780384A JPS6155938A JP S6155938 A JPS6155938 A JP S6155938A JP 59177803 A JP59177803 A JP 59177803A JP 17780384 A JP17780384 A JP 17780384A JP S6155938 A JPS6155938 A JP S6155938A
Authority
JP
Japan
Prior art keywords
semiconductor substrate
deep trap
electronic elements
electrodes
layer including
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59177803A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0428144B2 (enrdf_load_stackoverflow
Inventor
Haruo Horimatsu
細松　春夫
Morio Wada
守夫 和田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Hokushin Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Hokushin Electric Corp filed Critical Yokogawa Hokushin Electric Corp
Priority to JP59177803A priority Critical patent/JPS6155938A/ja
Publication of JPS6155938A publication Critical patent/JPS6155938A/ja
Publication of JPH0428144B2 publication Critical patent/JPH0428144B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Element Separation (AREA)
  • Light Receiving Elements (AREA)
JP59177803A 1984-08-27 1984-08-27 電子素子の分離法 Granted JPS6155938A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59177803A JPS6155938A (ja) 1984-08-27 1984-08-27 電子素子の分離法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59177803A JPS6155938A (ja) 1984-08-27 1984-08-27 電子素子の分離法

Publications (2)

Publication Number Publication Date
JPS6155938A true JPS6155938A (ja) 1986-03-20
JPH0428144B2 JPH0428144B2 (enrdf_load_stackoverflow) 1992-05-13

Family

ID=16037358

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59177803A Granted JPS6155938A (ja) 1984-08-27 1984-08-27 電子素子の分離法

Country Status (1)

Country Link
JP (1) JPS6155938A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5026573A (en) * 1988-03-02 1991-06-25 Tokai Regional Fishery Research Laboratory Method for the preparation of leached fish flesh and product thereof
US5196221A (en) * 1990-02-08 1993-03-23 Rutgers University Process for inhibiting the growth of bacteria on seafood

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4837232A (enrdf_load_stackoverflow) * 1971-09-15 1973-06-01
JPS5658226A (en) * 1979-10-17 1981-05-21 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPS5662882A (en) * 1979-10-30 1981-05-29 Agency Of Ind Science & Technol Feeding of raw material to pyrolysis plant and its device
JPS57177537A (en) * 1981-04-24 1982-11-01 Matsushita Electric Ind Co Ltd Isolation of semiconductor element
JPS5860557A (ja) * 1981-10-06 1983-04-11 Nec Corp 砒化ガリウム高抵抗層形成方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4837232A (enrdf_load_stackoverflow) * 1971-09-15 1973-06-01
JPS5658226A (en) * 1979-10-17 1981-05-21 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPS5662882A (en) * 1979-10-30 1981-05-29 Agency Of Ind Science & Technol Feeding of raw material to pyrolysis plant and its device
JPS57177537A (en) * 1981-04-24 1982-11-01 Matsushita Electric Ind Co Ltd Isolation of semiconductor element
JPS5860557A (ja) * 1981-10-06 1983-04-11 Nec Corp 砒化ガリウム高抵抗層形成方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5026573A (en) * 1988-03-02 1991-06-25 Tokai Regional Fishery Research Laboratory Method for the preparation of leached fish flesh and product thereof
US5196221A (en) * 1990-02-08 1993-03-23 Rutgers University Process for inhibiting the growth of bacteria on seafood

Also Published As

Publication number Publication date
JPH0428144B2 (enrdf_load_stackoverflow) 1992-05-13

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