JPS6155339U - - Google Patents
Info
- Publication number
- JPS6155339U JPS6155339U JP12669984U JP12669984U JPS6155339U JP S6155339 U JPS6155339 U JP S6155339U JP 12669984 U JP12669984 U JP 12669984U JP 12669984 U JP12669984 U JP 12669984U JP S6155339 U JPS6155339 U JP S6155339U
- Authority
- JP
- Japan
- Prior art keywords
- belt
- wafer
- semiconductor substrate
- outer periphery
- center
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 5
- 238000010586 diagram Methods 0.000 description 1
Description
第１図および第２図は本考案の一実施例を示し
第１図は平面図、第２図は側面図、第３図ないし
第５図はウエハが位置決めピンに接触して移動が
停止され次いで回転して位置決めをするときの異
なる状態の説明図である。
１３…ベルト、１４…半導体基板、１５ないし
１７…位置決めピン、１８…テーブル、２２…セ
ンサ。
1 and 2 show an embodiment of the present invention. FIG. 1 is a plan view, FIG. 2 is a side view, and FIGS. 3 to 5 show a state in which the wafer is in contact with a positioning pin and movement is stopped. FIG. 7 is an explanatory diagram of different states when the device is then rotated and positioned. 13... Belt, 14... Semiconductor substrate, 15 to 17... Positioning pin, 18... Table, 22... Sensor.
Claims (1)
により前記ベルト上にあるウエハを前記ベルトか
ら離脱して回転させるテーブルと、先端が前記ベ
ルトの上面より上方へ突出すべく設けられると共
に同テーブル上に同心的に位置するウエハの前記
ベルトによる搬入側に対し逆側の外周に治う位置
に設けられた少くとも２本の位置決めピンと、前
記ベルトの上面に対し上下方向へ出入可能に設け
られると共に前記ウエハの前記搬入側の外周に沿
う位置に設けられた少なくとも１本の位置決めピ
ンと、前記ウエハが前記テーブルにより回転され
て一定位置にきたことを検出して前記テーブルの
回転を停止させるセンサとからなる半導体基板の
位置決め装置。 (2) ３本の位置決めピンを正３角形頂点の位置
に設けると共に前記３角形の中心とテーブルの中
心とを一致させた実用新案登録請求の範囲第１項
記載の半導体基板の位置決め装置。[Claims for Utility Model Registration] (1) A belt for transporting wafers, a table for lifting the wafer on the belt to remove it from the belt and rotating it, and a tip of the belt that protrudes above the top surface of the belt. At least two positioning pins are provided on the outer periphery of the wafer concentrically located on the same table on the opposite side to the loading side of the belt, and at least one positioning pin that is provided so as to be movable in and out of the wafer and located along the outer periphery of the loading side of the wafer; A semiconductor substrate positioning device consisting of a sensor that stops the rotation of the semiconductor substrate. (2) The semiconductor substrate positioning device according to claim 1, wherein three positioning pins are provided at the vertices of a regular triangle, and the center of the triangle is aligned with the center of the table.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12669984U JPS6155339U (en) | 1984-08-21 | 1984-08-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12669984U JPS6155339U (en) | 1984-08-21 | 1984-08-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6155339U true JPS6155339U (en) | 1986-04-14 |
Family
ID=30685371
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12669984U Pending JPS6155339U (en) | 1984-08-21 | 1984-08-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6155339U (en) |
-
1984
- 1984-08-21 JP JP12669984U patent/JPS6155339U/ja active Pending
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