JPS6155263B2 - - Google Patents

Info

Publication number
JPS6155263B2
JPS6155263B2 JP55086992A JP8699280A JPS6155263B2 JP S6155263 B2 JPS6155263 B2 JP S6155263B2 JP 55086992 A JP55086992 A JP 55086992A JP 8699280 A JP8699280 A JP 8699280A JP S6155263 B2 JPS6155263 B2 JP S6155263B2
Authority
JP
Japan
Prior art keywords
type
sio
substrate
film
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55086992A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5710980A (en
Inventor
Shoichi Kakimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP8699280A priority Critical patent/JPS5710980A/ja
Publication of JPS5710980A publication Critical patent/JPS5710980A/ja
Publication of JPS6155263B2 publication Critical patent/JPS6155263B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP8699280A 1980-06-23 1980-06-23 Semiconductor pressure detecting device Granted JPS5710980A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8699280A JPS5710980A (en) 1980-06-23 1980-06-23 Semiconductor pressure detecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8699280A JPS5710980A (en) 1980-06-23 1980-06-23 Semiconductor pressure detecting device

Publications (2)

Publication Number Publication Date
JPS5710980A JPS5710980A (en) 1982-01-20
JPS6155263B2 true JPS6155263B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-11-27

Family

ID=13902359

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8699280A Granted JPS5710980A (en) 1980-06-23 1980-06-23 Semiconductor pressure detecting device

Country Status (1)

Country Link
JP (1) JPS5710980A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6387671A (ja) * 1986-10-01 1988-04-18 Seiko Epson Corp 磁気記録装置
CN102012287A (zh) * 2010-09-29 2011-04-13 东南大学 圆形硅薄膜微机电压力传感器

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6050970A (ja) * 1983-08-31 1985-03-22 Toshiba Corp 半導体圧力変換器
JPS62127637A (ja) * 1985-11-28 1987-06-09 Yokogawa Electric Corp 半導体圧力変換器
JP5867057B2 (ja) * 2011-12-16 2016-02-24 株式会社豊田中央研究所 Ｍｅｍｓデバイス

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6387671A (ja) * 1986-10-01 1988-04-18 Seiko Epson Corp 磁気記録装置
CN102012287A (zh) * 2010-09-29 2011-04-13 东南大学 圆形硅薄膜微机电压力传感器

Also Published As

Publication number Publication date
JPS5710980A (en) 1982-01-20

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