JPS6154527B2 - - Google Patents
Info
- Publication number
- JPS6154527B2 JPS6154527B2 JP52123607A JP12360777A JPS6154527B2 JP S6154527 B2 JPS6154527 B2 JP S6154527B2 JP 52123607 A JP52123607 A JP 52123607A JP 12360777 A JP12360777 A JP 12360777A JP S6154527 B2 JPS6154527 B2 JP S6154527B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- electrode
- intermediate layer
- silicon carbide
- polycrystalline silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 20
- 239000012212 insulator Substances 0.000 claims description 8
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 7
- 239000010953 base metal Substances 0.000 claims description 3
- 229910010271 silicon carbide Inorganic materials 0.000 description 14
- 239000007789 gas Substances 0.000 description 8
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 7
- 229910052721 tungsten Inorganic materials 0.000 description 7
- 239000010937 tungsten Substances 0.000 description 7
- 239000003792 electrolyte Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052582 BN Inorganic materials 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910015844 BCl3 Inorganic materials 0.000 description 2
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 238000005234 chemical deposition Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910000000 metal hydroxide Inorganic materials 0.000 description 2
- 150000004692 metal hydroxides Chemical class 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- VWDWKYIASSYTQR-UHFFFAOYSA-N sodium nitrate Chemical compound [Na+].[O-][N+]([O-])=O VWDWKYIASSYTQR-UHFFFAOYSA-N 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052728 basic metal Inorganic materials 0.000 description 1
- 150000003818 basic metals Chemical class 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 239000008151 electrolyte solution Substances 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 235000010344 sodium nitrate Nutrition 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H3/00—Electrochemical machining, i.e. removing metal by passing current between an electrode and a workpiece in the presence of an electrolyte
- B23H3/04—Electrodes specially adapted therefor or their manufacture
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Mechanical Engineering (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL7611566A NL7611566A (nl) | 1976-10-20 | 1976-10-20 | Elektrode voor elektrochemische bewerking. |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5351150A JPS5351150A (en) | 1978-05-10 |
| JPS6154527B2 true JPS6154527B2 (OSRAM) | 1986-11-22 |
Family
ID=19827080
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12360777A Granted JPS5351150A (en) | 1976-10-20 | 1977-10-17 | Electrode for electrochemical process |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US4136006A (OSRAM) |
| JP (1) | JPS5351150A (OSRAM) |
| DE (1) | DE2745124C2 (OSRAM) |
| FR (1) | FR2368334A1 (OSRAM) |
| GB (1) | GB1540538A (OSRAM) |
| NL (1) | NL7611566A (OSRAM) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4797527A (en) * | 1985-02-06 | 1989-01-10 | Kanegafuchi Kagaku Kogyo Kabushiki Kaisha | Electrode for electric discharge machining and method for producing the same |
| FR2698811B1 (fr) * | 1992-12-03 | 1995-01-06 | Snecma | Electrode d'usinage par électrolyse, procédé de fabrication de l'électrode et procédé d'usinage par l'électrolyse. |
| EP0741625B1 (en) * | 1994-11-28 | 1999-03-03 | Koninklijke Philips Electronics N.V. | Electrode for electrochemical machining |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB934557A (en) * | 1961-06-16 | 1963-08-21 | Gen Electric | Improvements in electrolytic conduction method and apparatus for controlled material removal |
| DE1565362A1 (de) * | 1966-03-31 | 1970-02-05 | Aeg Elotherm Gmbh | Werkzeugelektrode fuer die elektrochemische Bearbeitung |
| US3485744A (en) * | 1966-11-21 | 1969-12-23 | Westinghouse Electric Corp | Zirconium electrode for electro-chemical machining |
| SU424449A1 (ru) * | 1971-01-05 | 1974-05-15 | Катод для реактивного распыления кремния | |
| NL7316992A (nl) * | 1973-12-12 | 1975-06-16 | Philips Nv | Elektrode voor elektrochemisch bewerken. |
-
1976
- 1976-10-20 NL NL7611566A patent/NL7611566A/xx not_active Application Discontinuation
-
1977
- 1977-10-07 DE DE2745124A patent/DE2745124C2/de not_active Expired
- 1977-10-13 US US05/841,676 patent/US4136006A/en not_active Expired - Lifetime
- 1977-10-17 JP JP12360777A patent/JPS5351150A/ja active Granted
- 1977-10-17 GB GB43084/77A patent/GB1540538A/en not_active Expired
- 1977-10-19 FR FR7731453A patent/FR2368334A1/fr active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| DE2745124C2 (de) | 1985-01-10 |
| FR2368334B1 (OSRAM) | 1983-01-14 |
| GB1540538A (en) | 1979-02-14 |
| NL7611566A (nl) | 1978-04-24 |
| DE2745124A1 (de) | 1978-04-27 |
| FR2368334A1 (fr) | 1978-05-19 |
| JPS5351150A (en) | 1978-05-10 |
| US4136006A (en) | 1979-01-23 |
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