JPS6153110A - 水素化ケイ素の製造方法 - Google Patents

水素化ケイ素の製造方法

Info

Publication number
JPS6153110A
JPS6153110A JP17566384A JP17566384A JPS6153110A JP S6153110 A JPS6153110 A JP S6153110A JP 17566384 A JP17566384 A JP 17566384A JP 17566384 A JP17566384 A JP 17566384A JP S6153110 A JPS6153110 A JP S6153110A
Authority
JP
Japan
Prior art keywords
silicon
formulas
tables
compound
nitrogen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17566384A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0480849B2 (https=
Inventor
Masayoshi Ito
正義 伊藤
Hiroji Miyagawa
博治 宮川
Toshihiro Abe
智弘 安部
Hiroshige Amita
裕茂 網田
Kiyougo Koizumi
鏡悟 小泉
Masami Murakami
雅美 村上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP17566384A priority Critical patent/JPS6153110A/ja
Publication of JPS6153110A publication Critical patent/JPS6153110A/ja
Publication of JPH0480849B2 publication Critical patent/JPH0480849B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
JP17566384A 1984-08-23 1984-08-23 水素化ケイ素の製造方法 Granted JPS6153110A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17566384A JPS6153110A (ja) 1984-08-23 1984-08-23 水素化ケイ素の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17566384A JPS6153110A (ja) 1984-08-23 1984-08-23 水素化ケイ素の製造方法

Publications (2)

Publication Number Publication Date
JPS6153110A true JPS6153110A (ja) 1986-03-17
JPH0480849B2 JPH0480849B2 (https=) 1992-12-21

Family

ID=16000043

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17566384A Granted JPS6153110A (ja) 1984-08-23 1984-08-23 水素化ケイ素の製造方法

Country Status (1)

Country Link
JP (1) JPS6153110A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015048298A (ja) * 2013-09-04 2015-03-16 株式会社日本触媒 水素化シラン化合物の保管方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015048298A (ja) * 2013-09-04 2015-03-16 株式会社日本触媒 水素化シラン化合物の保管方法

Also Published As

Publication number Publication date
JPH0480849B2 (https=) 1992-12-21

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