JPS6153108A - モノシランの連続的製造方法 - Google Patents
モノシランの連続的製造方法Info
- Publication number
- JPS6153108A JPS6153108A JP59174295A JP17429584A JPS6153108A JP S6153108 A JPS6153108 A JP S6153108A JP 59174295 A JP59174295 A JP 59174295A JP 17429584 A JP17429584 A JP 17429584A JP S6153108 A JPS6153108 A JP S6153108A
- Authority
- JP
- Japan
- Prior art keywords
- catalyst
- column
- trichlorosilane
- reaction
- monosilane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 title claims abstract description 43
- 238000010924 continuous production Methods 0.000 title claims abstract description 4
- 239000003054 catalyst Substances 0.000 claims abstract description 52
- 239000000203 mixture Substances 0.000 claims abstract description 41
- 238000007323 disproportionation reaction Methods 0.000 claims abstract description 39
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 claims abstract description 36
- 239000005052 trichlorosilane Substances 0.000 claims abstract description 36
- 238000006243 chemical reaction Methods 0.000 claims abstract description 33
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 claims abstract description 22
- 239000005049 silicon tetrachloride Substances 0.000 claims abstract description 22
- 238000004821 distillation Methods 0.000 claims abstract description 21
- 239000007788 liquid Substances 0.000 claims abstract description 21
- 229910000077 silane Inorganic materials 0.000 claims abstract description 20
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims abstract description 10
- 238000000034 method Methods 0.000 claims abstract description 10
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 claims abstract description 9
- 150000003512 tertiary amines Chemical class 0.000 claims abstract description 4
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 claims description 15
- 238000001704 evaporation Methods 0.000 claims description 14
- 239000005046 Chlorosilane Substances 0.000 claims description 8
- 125000000217 alkyl group Chemical group 0.000 claims description 3
- 125000004432 carbon atom Chemical group C* 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims description 2
- 238000000926 separation method Methods 0.000 abstract description 7
- 230000000694 effects Effects 0.000 abstract description 5
- 238000005265 energy consumption Methods 0.000 abstract description 2
- 230000008020 evaporation Effects 0.000 description 12
- 239000002994 raw material Substances 0.000 description 12
- 238000003860 storage Methods 0.000 description 9
- 238000009835 boiling Methods 0.000 description 7
- 239000007789 gas Substances 0.000 description 7
- 125000001931 aliphatic group Chemical group 0.000 description 5
- 239000007795 chemical reaction product Substances 0.000 description 5
- 150000001875 compounds Chemical class 0.000 description 5
- 150000001412 amines Chemical class 0.000 description 4
- IOJUPLGTWVMSFF-UHFFFAOYSA-N benzothiazole Chemical compound C1=CC=C2SC=NC2=C1 IOJUPLGTWVMSFF-UHFFFAOYSA-N 0.000 description 4
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 4
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 4
- ICSWLKDKQBNKAY-UHFFFAOYSA-N 1,1,3,3,5,5-hexamethyl-1,3,5-trisilinane Chemical compound C[Si]1(C)C[Si](C)(C)C[Si](C)(C)C1 ICSWLKDKQBNKAY-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- OEERIBPGRSLGEK-UHFFFAOYSA-N carbon dioxide;methanol Chemical compound OC.O=C=O OEERIBPGRSLGEK-UHFFFAOYSA-N 0.000 description 3
- -1 silane compound Chemical class 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- KYVBNYUBXIEUFW-UHFFFAOYSA-N 1,1,3,3-tetramethylguanidine Chemical compound CN(C)C(=N)N(C)C KYVBNYUBXIEUFW-UHFFFAOYSA-N 0.000 description 2
- AVQQQNCBBIEMEU-UHFFFAOYSA-N 1,1,3,3-tetramethylurea Chemical compound CN(C)C(=O)N(C)C AVQQQNCBBIEMEU-UHFFFAOYSA-N 0.000 description 2
- LXBGSDVWAMZHDD-UHFFFAOYSA-N 2-methyl-1h-imidazole Chemical compound CC1=NC=CN1 LXBGSDVWAMZHDD-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 2
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 2
- YKFRUJSEPGHZFJ-UHFFFAOYSA-N N-trimethylsilylimidazole Chemical compound C[Si](C)(C)N1C=CN=C1 YKFRUJSEPGHZFJ-UHFFFAOYSA-N 0.000 description 2
- 239000003957 anion exchange resin Substances 0.000 description 2
- 230000003197 catalytic effect Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004817 gas chromatography Methods 0.000 description 2
- XLSZMDLNRCVEIJ-UHFFFAOYSA-N methylimidazole Natural products CC1=CNC=N1 XLSZMDLNRCVEIJ-UHFFFAOYSA-N 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 150000004756 silanes Chemical class 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- IMFACGCPASFAPR-UHFFFAOYSA-N tributylamine Chemical compound CCCCN(CCCC)CCCC IMFACGCPASFAPR-UHFFFAOYSA-N 0.000 description 2
- PPKPKFIWDXDAGC-IHWYPQMZSA-N (z)-1,2-dichloroprop-1-ene Chemical compound C\C(Cl)=C\Cl PPKPKFIWDXDAGC-IHWYPQMZSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- DESGIDRJCLIWRS-UHFFFAOYSA-N [SiH]Cl Chemical compound [SiH]Cl DESGIDRJCLIWRS-UHFFFAOYSA-N 0.000 description 1
- ICXXXLGATNSZAV-UHFFFAOYSA-N butylazanium;chloride Chemical compound [Cl-].CCCC[NH3+] ICXXXLGATNSZAV-UHFFFAOYSA-N 0.000 description 1
- 239000012295 chemical reaction liquid Substances 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000011437 continuous method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- OAGOUCJGXNLJNL-UHFFFAOYSA-N dimethylcyanamide Chemical compound CN(C)C#N OAGOUCJGXNLJNL-UHFFFAOYSA-N 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 235000015203 fruit juice Nutrition 0.000 description 1
- 150000003840 hydrochlorides Chemical class 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 239000002362 mulch Substances 0.000 description 1
- XTAZYLNFDRKIHJ-UHFFFAOYSA-N n,n-dioctyloctan-1-amine Chemical compound CCCCCCCCN(CCCCCCCC)CCCCCCCC XTAZYLNFDRKIHJ-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 125000001453 quaternary ammonium group Chemical group 0.000 description 1
- 238000009790 rate-determining step (RDS) Methods 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/50—Improvements relating to the production of bulk chemicals
- Y02P20/584—Recycling of catalysts
Landscapes
- Silicon Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59174295A JPS6153108A (ja) | 1984-08-22 | 1984-08-22 | モノシランの連続的製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59174295A JPS6153108A (ja) | 1984-08-22 | 1984-08-22 | モノシランの連続的製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6153108A true JPS6153108A (ja) | 1986-03-17 |
| JPH0470249B2 JPH0470249B2 (en, 2012) | 1992-11-10 |
Family
ID=15976169
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59174295A Granted JPS6153108A (ja) | 1984-08-22 | 1984-08-22 | モノシランの連続的製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6153108A (en, 2012) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2426088A1 (en) * | 2010-09-03 | 2012-03-07 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Process for producing monosilane from dichlorosilane |
| EP2426089A1 (en) * | 2010-09-03 | 2012-03-07 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Process for separating monosilane from chlorosilanes-rich mixture |
| CN103172071A (zh) * | 2013-03-27 | 2013-06-26 | 天津大学 | 三氯氢硅歧化反应精馏制备高纯硅烷的装置及方法 |
| EP2085358A4 (en) * | 2006-09-27 | 2015-06-17 | Denki Kagaku Kogyo Kk | METHOD FOR CONTINUOUS PRODUCTION OF MONOSILANE |
| CN106241813A (zh) * | 2016-08-16 | 2016-12-21 | 上海交通大学 | 一种由三氯氢硅生产高纯硅烷的系统及方法 |
-
1984
- 1984-08-22 JP JP59174295A patent/JPS6153108A/ja active Granted
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2085358A4 (en) * | 2006-09-27 | 2015-06-17 | Denki Kagaku Kogyo Kk | METHOD FOR CONTINUOUS PRODUCTION OF MONOSILANE |
| EP2426088A1 (en) * | 2010-09-03 | 2012-03-07 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Process for producing monosilane from dichlorosilane |
| EP2426089A1 (en) * | 2010-09-03 | 2012-03-07 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Process for separating monosilane from chlorosilanes-rich mixture |
| WO2012028571A1 (en) * | 2010-09-03 | 2012-03-08 | L'air Liquide Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Process for producing monosilane from dichlorosilane |
| WO2012028570A1 (en) * | 2010-09-03 | 2012-03-08 | L'air Liquide,Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Process for separating monosilane from chlorosilanes-rich mixture |
| US20130156677A1 (en) * | 2010-09-03 | 2013-06-20 | L'Air Liquide, Société Anonyme pour I'Etude et L'Exploitation des Procédés Georges Claude | Process for separating monosilane from chlorosilanes-rich mixture |
| US8871168B2 (en) | 2010-09-03 | 2014-10-28 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Process for producing monosilane from dichlorosilane |
| US9242868B2 (en) | 2010-09-03 | 2016-01-26 | L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude | Process for separating monosilane from chlorosilanes-rich mixture |
| CN103172071A (zh) * | 2013-03-27 | 2013-06-26 | 天津大学 | 三氯氢硅歧化反应精馏制备高纯硅烷的装置及方法 |
| CN103172071B (zh) * | 2013-03-27 | 2015-06-03 | 天津大学 | 三氯氢硅歧化反应精馏制备高纯硅烷的装置及方法 |
| CN106241813A (zh) * | 2016-08-16 | 2016-12-21 | 上海交通大学 | 一种由三氯氢硅生产高纯硅烷的系统及方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0470249B2 (en, 2012) | 1992-11-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5419456B2 (ja) | モノシランの連続的製造方法 | |
| CA2624534C (en) | Process for producing monosilane | |
| US4610858A (en) | Chlorosilane disproportionation catalyst and method for producing a silane compound by means of the catalyst | |
| CA2357025C (en) | Method and system for producing silane | |
| CN102627282B (zh) | 通过蒸馏纯化氯硅烷的方法 | |
| RU2551493C2 (ru) | Способ и система для получения моносилана | |
| JPS641406B2 (en, 2012) | ||
| JPS6153108A (ja) | モノシランの連続的製造方法 | |
| US9242868B2 (en) | Process for separating monosilane from chlorosilanes-rich mixture | |
| JPS643804B2 (en, 2012) | ||
| JPS61191513A (ja) | シラン化合物の連続的製造方法 | |
| JPH0472764B2 (en, 2012) | ||
| JPS643807B2 (en, 2012) | ||
| KR20170060026A (ko) | 펜타클로로디실란의 제조 방법 및 이 방법에 의해 제조되는 펜타클로로디실란 | |
| EP0213215B1 (en) | Chlorosilane disproportionation catalyst and method for producing a silane compound by means of the catalyst | |
| US20240182497A1 (en) | Method and system for selective recovery of monochlorosilane and dichlorosilane in polysilicon production process | |
| US8871168B2 (en) | Process for producing monosilane from dichlorosilane | |
| JPH052379B2 (en, 2012) | ||
| JP2014227322A (ja) | モノシランの製造装置および製造方法 | |
| JPH06228127A (ja) | トリオキサンの製造方法 | |
| JPS6197128A (ja) | シラン化合物の連続的製造法 | |
| JPS6153107A (ja) | シラン化合物の連続的製造方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |