JPS6152979B2 - - Google Patents
Info
- Publication number
- JPS6152979B2 JPS6152979B2 JP4211578A JP4211578A JPS6152979B2 JP S6152979 B2 JPS6152979 B2 JP S6152979B2 JP 4211578 A JP4211578 A JP 4211578A JP 4211578 A JP4211578 A JP 4211578A JP S6152979 B2 JPS6152979 B2 JP S6152979B2
- Authority
- JP
- Japan
- Prior art keywords
- street
- detection
- illumination
- detected
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 118
- 239000004065 semiconductor Substances 0.000 claims description 29
- 238000006243 chemical reaction Methods 0.000 claims description 7
- 230000001678 irradiating effect Effects 0.000 claims description 5
- 238000005286 illumination Methods 0.000 description 69
- 235000012431 wafers Nutrition 0.000 description 43
- 238000010586 diagram Methods 0.000 description 18
- 238000000034 method Methods 0.000 description 10
- 238000006073 displacement reaction Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 238000004364 calculation method Methods 0.000 description 3
- 238000003909 pattern recognition Methods 0.000 description 2
- 230000004069 differentiation Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Landscapes
- Dicing (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4211578A JPS54134982A (en) | 1978-04-12 | 1978-04-12 | Detector for street position on semiconductor wafer |
| US05/964,353 US4213117A (en) | 1977-11-28 | 1978-11-28 | Method and apparatus for detecting positions of chips on a semiconductor wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4211578A JPS54134982A (en) | 1978-04-12 | 1978-04-12 | Detector for street position on semiconductor wafer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54134982A JPS54134982A (en) | 1979-10-19 |
| JPS6152979B2 true JPS6152979B2 (ko) | 1986-11-15 |
Family
ID=12626944
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4211578A Granted JPS54134982A (en) | 1977-11-28 | 1978-04-12 | Detector for street position on semiconductor wafer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54134982A (ko) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5788414A (en) * | 1980-11-21 | 1982-06-02 | Seiko Epson Corp | Alignment device |
| JP5700436B2 (ja) * | 2011-06-07 | 2015-04-15 | 株式会社ディスコ | 加工装置 |
-
1978
- 1978-04-12 JP JP4211578A patent/JPS54134982A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54134982A (en) | 1979-10-19 |
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