JPS6151638A - Optomagnetic information recording medium - Google Patents
Optomagnetic information recording mediumInfo
- Publication number
- JPS6151638A JPS6151638A JP17446484A JP17446484A JPS6151638A JP S6151638 A JPS6151638 A JP S6151638A JP 17446484 A JP17446484 A JP 17446484A JP 17446484 A JP17446484 A JP 17446484A JP S6151638 A JPS6151638 A JP S6151638A
- Authority
- JP
- Japan
- Prior art keywords
- film
- magneto
- recording medium
- information recording
- refractive index
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
- G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
- G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
- G11B11/10582—Record carriers characterised by the selection of the material or by the structure or form
- G11B11/10586—Record carriers characterised by the selection of the material or by the structure or form characterised by the selection of the material
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は情報の録再を希土類遷移金属薄膜などの元Ｓ気
記録材料とレーザー光を用いて行なう光磁気記録媒体に
おける膜構成に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a film structure in a magneto-optical recording medium in which information is recorded and reproduced using an S-based recording material such as a rare earth transition metal thin film and a laser beam.
従来よシ元磁気情報記録媒体にかける膜構造は種々多く
の例が発表されておシ、特に干渉膜材料の発表としては
ＺｒＯ２，ＴｌＯ２、Ｚｎ８．ＡｌＮ、ＳＬなどのＯ／
Ｎお工び記録寿命改善材料が提案されている。例えば、
第５１回応用物理学関係連合講演予稿集Ｐ、！１４８．
Ｐ、３４９にこの工うな従来の光磁気情帷記録媒体の膜
構造が提載されている。Many examples of film structures applied to magnetic information recording media have been published in the past, and examples of interference film materials in particular include ZrO2, TlO2, Zn8. O/ such as AlN, SL, etc.
N. Materials that improve the record life of workmanship have been proposed. for example,
Proceedings of the 51st Applied Physics Association Lectures P! 148.
The film structure of a conventional magneto-optical information recording medium is presented in P. 349.
しかしながら従来の光磁気記録材料の膜構造は干渉膜の
材料に注目が向けられてき窺が、その記録特性は保護膜
材料によっても変化するため、干渉膜、光磁気記録材料
、保護膜材料老台わせｆｃ総合的な膜構造の改善が必要
とされ、光磁気情報記録媒体の０７Ｎが充分向上できな
かったという欠点？有していた。However, with regard to the film structure of conventional magneto-optical recording materials, attention seems to have been focused on the material of the interference film, but since the recording characteristics also change depending on the material of the protective film, it is important to understand that the film structure of the interference film, magneto-optical recording material, and protective film material has changed. Is it a disadvantage that the 07N of the magneto-optical information recording medium could not be sufficiently improved due to the need to improve the overall film structure? had.
本発明は従来のこのような欠点を石決するため。The purpose of the present invention is to overcome these drawbacks of the conventional technology.
光磁気情報記録媒体の膜構造をレーザー光の入射両刀１
ら順に透明基板、屈折率２．２〜３なる透明干渉膜、光
磁気記録材料、屈折率５以上の保護膜とすることによυ
総合的な見地によりＣｉ／Ｎ−ｒ向上させること？目的
としている。The film structure of a magneto-optical information recording medium is exposed to laser light 1
A transparent substrate, a transparent interference film with a refractive index of 2.2 to 3, a magneto-optical recording material, and a protective film with a refractive index of 5 or more are used in this order.
Is it possible to improve Ci/N-r from a comprehensive perspective? The purpose is
上記のように構成された光磁気情報記録媒体は、屈折率
２〜６の干渉膜で主として磁気カー回転角θｋを増大し
、屈折率３以上の保護膜によって主として反射率Ｒで増
大することによシ総体的に０／ＩＪｚ−向上させること
ができるのである。In the magneto-optical information recording medium configured as described above, the magnetic Kerr rotation angle θk is mainly increased by the interference film having a refractive index of 2 to 6, and the reflectance R is mainly increased by the protective film having a refractive index of 3 or more. Therefore, it is possible to improve 0/IJz overall.
以下に本発明の実抱例を図面にもとづいて説明する。第
１図は本発明による光情報記録媒体の１実抱例による構
成図であシ、１はＰＭＭＡ基板、２は０ｅＯ２干渉膜、
３はＧｄＴｂＦｅ記録膜、４はＳＬ保護膜である。１と
してはＰＭＭＡ以外にもアＯあるいにガラスなどの透明
基板を用いてもよい。２としてはＺ ｒ ０２以外にも
多ｎｓ。Practical examples of the present invention will be explained below based on the drawings. FIG. 1 is a block diagram of one practical example of an optical information recording medium according to the present invention, in which 1 is a PMMA substrate, 2 is an OeO2 interference film,
3 is a GdTbFe recording film, and 4 is an SL protective film. In addition to PMMA, transparent substrates such as aluminum or glass may also be used as the substrate. As for 2, there are many ns other than Z r 02.
ＡＪ２１Ｊ、ＴｉＯ２，０ｅＯ２などを用いてもよいが
、特に基板１としてＰＭＭＡやＰＣなどの透明プラスチ
ック基板を用いる場合は、Ｚｎ８などの吸湿性のある材
料を用いるのは記録寿敵の低下等の理由によりさけた方
が好ましい。３としてはＧｄＴｂＦｅ以外にもＴｂＦｅ
、ＴｂＦｅ０ｏ等の希土類−遷移金属光磁気記録材料
を用いてもよい。４としては８１以外にも！３ Ｌｏ
、 Ｓ Ｌ３Ｎ４などで用いてもよい。AJ21J, TiO2, 0eO2, etc. may be used, but especially when using a transparent plastic substrate such as PMMA or PC as the substrate 1, it is recommended to use a hygroscopic material such as Zn8 for reasons such as a decrease in recording life. It is preferable to avoid it. In addition to GdTbFe, TbFe can be used as 3.
, TbFe0o, and other rare earth-transition metal magneto-optical recording materials may also be used. 4 other than 81! 3 Lo
, S L3N4, etc.
第１因においてＺｒ０１千渉膜の膜厚ｔ９００Ａ、Ｔｂ
Ｆｅ記録膜の膜１％”ｚ−１２０ＯＡ、８Ｌ膜厚を５２
ＯＡとじ九ときのＣ／Ｎは平均値で５６．３（ＬＢが得
られた。これは従来の膜構造で得られているＯ／Ｎで最
大の値である５５ａＢ’ｚ越えている。なおレーザー光
は波長８３０ｎｍのもの２用いた。In the first factor, the film thickness t900A of Zr01000 film, Tb
Fe recording film 1%"z-120OA, 8L film thickness 52
The C/N at the end of OA binding was an average value of 56.3 (LB). This exceeds the maximum O/N value of 55aB'z obtained with the conventional film structure. Laser light 2 with a wavelength of 830 nm was used.
本発明に二る光磁気情報記録媒体？構成する膜材料で選
定−ｒるＬめ、発明者は壕ず干渉膜材料として８１０１
．８１０．Ｚｒ０１．ＺｎＳ、／ＩＮ。Magneto-optical information recording medium according to the present invention? Selected based on the constituent membrane material, the inventor used 8101 as a trenchless interference membrane material.
．． 810. Zr01. ZnS,/IN.
Ｓｌを選び、光磁気記録膜として膜厚１２００スのＧｄ
ＴｂＦｅ、保護膜として膜厚１１００スの５ＬＯｚ−選
んで干渉膜厚？変化させたときのＣ／Ｎの変化を調べた
。このときの結果？示したのが第２囚である。な卦この
ときのレーザー光波長は８３０ｎｍである。第２図にお
いて５．／）、７゜８．９．１０はそれぞれこの順にＺ
ｎ８ 、ＡＩＮ 。Gd with a film thickness of 1200 mm was selected as a magneto-optical recording film.
TbFe, choose 5LOz with a film thickness of 1100mm as a protective film and check the interference film thickness? The change in C/N was investigated when changing the C/N. The result at this time? The person shown is the second prisoner. The wavelength of the laser light at this time is 830 nm. In Figure 2, 5. /), 7゜8.9.10 are Z in this order respectively.
n8, AIN.
ＳＬ、Ｚｒ０ｚ 、８１０．８ＬＯ２’ｇ干渉膜として
用いた場合の曲線で示す。第２図〃・ら干渉膜としてＺ
ｒＯ’２．ＺｎＳ、、ＡｆｉＮ、ＳＬ’ｉ−用い九場合
は干渉膜の膜厚が１２００Ｘ近傍でＣ／Ｎが極太になる
ことがわかる。また、このときの干渉膜屈折率ｔエリプ
ソメーターで測定したところ、Ｓ Ｌｏｔ膜は１．４６
、ｓｔｏ膜は１．８２、ＺｒＯ２膜は２．１６、Ｚｎ８
膜は２．６５、ｈｆ）、ｘ膜１ｑ２．８４．８１膜は！
Ｌ５２であり、このことにシ干渉１莫の屈折率が２〜３
あればＣ／Ｎは干渉膜厚１２００ス近傍で急激に増大す
ることがわかる。SL, Zr0z, 810.8LO2'g is shown as a curve when used as an interference film. Figure 2: Z as an interference film
rO'2. It can be seen that in the case of ZnS, AfiN, and SL'i-9, the C/N becomes extremely thick when the thickness of the interference film is around 1200X. In addition, the refractive index of the interference film at this time was measured using an ellipsometer, and the S Lot film had a refractive index of 1.46.
, 1.82 for sto film, 2.16 for ZrO2 film, Zn8
Membrane is 2.65, hf ), x membrane 1q2.84.81 membrane is!
L52, which means that the refractive index of the interference light is 2 to 3.
If so, it can be seen that the C/N increases rapidly near the interference film thickness of 1200s.
次に本発明による光磁気情報記録媒体の保護膜材料を選
定するため、まず干渉膜材料として膜厚１２００ＡのＺ
ｎＳ、光磁気記録膜として膜厚１２００スのＧａ’Ｔ１
）Ｆ’θ、保護膜材料としてＳ １０２ 、ＺｒＯ２、
Ａｌ１Ｎ、Ｓ Ｌ’：用い保護膜の膜厚を変化させたと
きのＯ／Ｈの変化を波長８３０ｎｍのレーザー光を用い
て調べた。このときの結果を示したのが第６図でおる。Next, in order to select a protective film material for the magneto-optical information recording medium according to the present invention, first, Z with a film thickness of 1200A was used as an interference film material.
nS, Ga'T1 with a film thickness of 1200 mm as a magneto-optical recording film.
) F'θ, S 102 , ZrO2 as protective film material,
Al1N, S L': The change in O/H when the thickness of the protective film used was changed using a laser beam with a wavelength of 830 nm. Figure 6 shows the results at this time.
第３図にかいて１１，１２，１３．１４はそれぞれこの
順にＳＬ、ＡＲＭ、Ｚｒ０１ ．５ＬＯ１ｆ保護膜とし
て用いた場合の曲線上水す。第６図から明ら〃）なよう
に保護膜としては８Ｌｉ用いれば広い保護膜の膜厚範囲
でＯ／Ｎが５５ｄＢ以上の光磁気情報記録媒体で得るこ
とができる。また保護膜の屈折率が６以上あれば同様の
効果が認められる。したがって、５Ｌ３Ｎ４ ．８１０
は本発明による光磁気情報記録媒体の保護膜材料として
使用することによシ高０７Ｎ’：得ることができる。In FIG. 3, 11, 12, 13.14 are SL, ARM, Zr01 . 5LO1f Curve when used as a protective film. As is clear from FIG. 6), if 8Li is used as the protective film, a magneto-optical information recording medium with an O/N of 55 dB or more can be obtained over a wide range of protective film thickness. Further, if the protective film has a refractive index of 6 or more, a similar effect can be observed. Therefore, 5L3N4. 810
can be obtained with a height of 07N' by using it as a protective film material for the magneto-optical information recording medium according to the present invention.
特に、干渉膜材料としてのＺｒＯ２，ＡｌＮ＝Ｔｈよび
保護膜材料としてのＳＬは製造上容易さ、材料の安定性
で・ら考えよυ好ましい材料と考えられる。また保護膜
材料としてのｍｌはＨｋドープしたアモルファスＳＬと
することによυ安定で低ノイズの膜とすることもでき良
い材料でちる。In particular, ZrO2, AlN=Th as the interference film material and SL as the protective film material are considered preferable materials in terms of ease of manufacture and material stability. Furthermore, by using Hk-doped amorphous SL as the protective film material, a stable and low-noise film can be obtained, and a good material can be used.
本発明は以上説明したように、膜構成ｔレーザー光の入
射面〃１ら順に透明基板、屈折率２〜６なる透明干渉膜
、光磁気記母材料、屈折率３以上の保護膜〃・らなる工
うにし、特に干渉膜材料としてＡＲＮあるいはＺｒＯ２
、保護膜材料としてＳＬを用いることによシＯ／Ｎが５
５ｔｌＢ以上の光磁気情報記録媒体とすることができる
という効果を有する。As explained above, the present invention has a film structure consisting of, in order from 1 to 1, the incident surface of laser light: a transparent substrate, a transparent interference film with a refractive index of 2 to 6, a magneto-optical recording material, a protective film with a refractive index of 3 or more, and so on. In particular, ARN or ZrO2 is used as an interference film material.
, by using SL as the protective film material, the O/N is 5.
This has the effect that it can be used as a magneto-optical information recording medium of 5 tlB or more.
第１図は本発明による元情報記録媒体の１実危例の構成
図であり、第２図は種々の干渉膜材料を用いその膜厚を
変化させたときのＯ／Ｈの変化を示した図であり、第５
図は種々の保護膜材料を用いその膜厚ｋｌ化させたとき
のＣ／Ｎの変化に示した図である。
１・・・・・・Ｐ Ｍ ＭΔ基板
２・・・・・・ＺｒＯ２干渉膜
３・・・・・・ＴｂＦ’ｅ記碌膜
４・・・・・・８１保護膜
５・・・・・・ＺｎＳを用いた場合
６．１２・・・・・・Ａ ＲＮ ｔ″用いた場合７．１
１・・・・・・ｓｔｙ用いた場合８．１３・・・・・・
Ｚｒ０ｚｔ”用い１こ場合９・・・・・・３ＬＯを用い
た場合
以上Fig. 1 is a block diagram of a practical example of the original information recording medium according to the present invention, and Fig. 2 shows changes in O/H when various interference film materials are used and the film thickness is changed. Figure 5.
The figure shows the change in C/N when various protective film materials are used and the film thickness is increased to kl. 1...P M MΔ Substrate 2...ZrO2 interference film 3...TbF'e-enabled film 4...81 Protective film 5...・6.12 when using ZnS 7.1 when using A RN t″
1... When using sty 8.13...
When using ``Zr0zt'' and 1 case, 9......3LO is used and above.
Claims (2)
などの光磁気記録材料としレーザー光を用いて行なう光
磁気情報記録媒体において、その膜構成がレーザー光の
入射面から順にガラスあるいはＰＭＭＡなどの透明基板
、屈折率２〜３なる透明干渉膜、光磁気記録材料、屈折
率３以上の保護膜からなることを特徴とする光磁気情報
記録媒体。(1) In a magneto-optical information recording medium in which information is recorded and reproduced using laser light using a magneto-optical recording material such as a rare earth-transition metal amorphous thin film, the film structure is made of glass, PMMA, etc. in order from the laser light incident surface. 1. A magneto-optical information recording medium comprising a transparent substrate, a transparent interference film with a refractive index of 2 to 3, a magneto-optical recording material, and a protective film with a refractive index of 3 or more.
膜がＳｉであることを特徴とする光磁気情報記録媒体。(2) A magneto-optical information recording medium characterized in that the interference film is AlN or ZrO_2 and the protective film is Si.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17446484A JPS6151638A (en) | 1984-08-22 | 1984-08-22 | Optomagnetic information recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17446484A JPS6151638A (en) | 1984-08-22 | 1984-08-22 | Optomagnetic information recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6151638A true JPS6151638A (en) | 1986-03-14 |
Family
ID=15978940
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17446484A Pending JPS6151638A (en) | 1984-08-22 | 1984-08-22 | Optomagnetic information recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6151638A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02152046A (en) * | 1988-12-02 | 1990-06-12 | Daicel Chem Ind Ltd | Magneto-optical medium |
| JPH0390088U (en) * | 1989-12-28 | 1991-09-13 |
-
1984
- 1984-08-22 JP JP17446484A patent/JPS6151638A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02152046A (en) * | 1988-12-02 | 1990-06-12 | Daicel Chem Ind Ltd | Magneto-optical medium |
| JPH0390088U (en) * | 1989-12-28 | 1991-09-13 |
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