JPS6151260B2 - - Google Patents

Info

Publication number
JPS6151260B2
JPS6151260B2 JP9708380A JP9708380A JPS6151260B2 JP S6151260 B2 JPS6151260 B2 JP S6151260B2 JP 9708380 A JP9708380 A JP 9708380A JP 9708380 A JP9708380 A JP 9708380A JP S6151260 B2 JPS6151260 B2 JP S6151260B2
Authority
JP
Japan
Prior art keywords
gas
present
sensitivity
palladium
oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9708380A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5722547A (en
Inventor
Masahiro Nishikawa
Kuni Ogawa
Atsushi Abe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP9708380A priority Critical patent/JPS5722547A/ja
Publication of JPS5722547A publication Critical patent/JPS5722547A/ja
Publication of JPS6151260B2 publication Critical patent/JPS6151260B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP9708380A 1980-07-15 1980-07-15 Gas sensing element Granted JPS5722547A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9708380A JPS5722547A (en) 1980-07-15 1980-07-15 Gas sensing element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9708380A JPS5722547A (en) 1980-07-15 1980-07-15 Gas sensing element

Publications (2)

Publication Number Publication Date
JPS5722547A JPS5722547A (en) 1982-02-05
JPS6151260B2 true JPS6151260B2 (enrdf_load_stackoverflow) 1986-11-07

Family

ID=14182738

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9708380A Granted JPS5722547A (en) 1980-07-15 1980-07-15 Gas sensing element

Country Status (1)

Country Link
JP (1) JPS5722547A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02193051A (ja) * 1989-01-20 1990-07-30 Stanley Electric Co Ltd 有機半導体を用いたガスセンサ
JP4602000B2 (ja) * 2004-06-16 2010-12-22 株式会社鷺宮製作所 水素ガス検知素子、水素ガスセンサおよび水素ガス検知方法

Also Published As

Publication number Publication date
JPS5722547A (en) 1982-02-05

Similar Documents

Publication Publication Date Title
Heras et al. Work function changes upon water contamination of metal surfaces
JP2002328109A (ja) 水素ガス検出素子及びその製造方法
US4016524A (en) Sensor for a gas detector, in particular for smoke detection
York Properties of evaporated thin films of SiO
CN111398362A (zh) 一种纳米机电氢气传感器及制备方法
US4356150A (en) Humidity sensor with electrical rejection of contaminants
JPS6151260B2 (enrdf_load_stackoverflow)
JPS588743B2 (ja) ガス・湿度センサ
JPS60211347A (ja) 水素ガスセンサ−
US6059937A (en) Sensor having tin oxide thin film for detecting methane gas and propane gas, and process for manufacturing thereof
CN1037041C (zh) 金属－氧化物－半导体结构电容式湿敏器件及其制造方法
JPS61191953A (ja) ガス検出装置
JP2002328108A (ja) 水素ガス検出素子及びその製造方法
JPS638548A (ja) ガスセンサ及びその製造方法
JPS60211348A (ja) 水素ガスセンサ−
JPH06174674A (ja) 半導体ガスセンサ
JPH04348267A (ja) ガスセンサ
JPS632054B2 (enrdf_load_stackoverflow)
JPS6030894B2 (ja) ガス・湿度センサの製造方法
JPS6030893B2 (ja) センサの製造方法
JPS5840694B2 (ja) ガス・湿度センサの製造方法
JPH06213853A (ja) ガス検出素子の製造法
JPH03251755A (ja) ガスセンサ
KR100187386B1 (ko) 산화물 반도체의 이종 접합형 센서
JP2955583B2 (ja) ガスセンサ用検知素子