JPS6148420A - シランの精製方法 - Google Patents
シランの精製方法Info
- Publication number
- JPS6148420A JPS6148420A JP17123584A JP17123584A JPS6148420A JP S6148420 A JPS6148420 A JP S6148420A JP 17123584 A JP17123584 A JP 17123584A JP 17123584 A JP17123584 A JP 17123584A JP S6148420 A JPS6148420 A JP S6148420A
- Authority
- JP
- Japan
- Prior art keywords
- acid
- silica gel
- disiloxane
- silane
- supported
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 title claims abstract description 29
- 229910000077 silane Inorganic materials 0.000 title claims abstract description 19
- 238000000746 purification Methods 0.000 title description 3
- 239000002253 acid Substances 0.000 claims abstract description 20
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical compound [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 claims abstract description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 18
- 229910002027 silica gel Inorganic materials 0.000 claims abstract description 17
- 239000000741 silica gel Substances 0.000 claims abstract description 17
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims abstract description 12
- 238000000034 method Methods 0.000 claims description 19
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 abstract description 8
- 238000001035 drying Methods 0.000 abstract description 7
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 abstract description 5
- VEDJZFSRVVQBIL-UHFFFAOYSA-N trisilane Chemical compound [SiH3][SiH2][SiH3] VEDJZFSRVVQBIL-UHFFFAOYSA-N 0.000 abstract description 4
- 229910052500 inorganic mineral Inorganic materials 0.000 abstract description 2
- 239000011707 mineral Substances 0.000 abstract description 2
- 239000000203 mixture Substances 0.000 abstract description 2
- 235000011149 sulphuric acid Nutrition 0.000 abstract 2
- 238000007598 dipping method Methods 0.000 abstract 1
- 235000011007 phosphoric acid Nutrition 0.000 abstract 1
- 150000004756 silanes Chemical class 0.000 description 7
- 239000003463 adsorbent Substances 0.000 description 6
- 239000012535 impurity Substances 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 5
- 238000001179 sorption measurement Methods 0.000 description 5
- 239000007864 aqueous solution Substances 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 150000007513 acids Chemical class 0.000 description 2
- 238000005273 aeration Methods 0.000 description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052987 metal hydride Inorganic materials 0.000 description 2
- 150000004681 metal hydrides Chemical class 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 1
- 241000208365 Celastraceae Species 0.000 description 1
- 229910019752 Mg2Si Inorganic materials 0.000 description 1
- 241001494479 Pecora Species 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 235000000336 Solanum dulcamara Nutrition 0.000 description 1
- 229910021536 Zeolite Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 235000019270 ammonium chloride Nutrition 0.000 description 1
- 150000003863 ammonium salts Chemical class 0.000 description 1
- 239000011260 aqueous acid Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000001722 carbon compounds Chemical class 0.000 description 1
- 239000003610 charcoal Substances 0.000 description 1
- WSCXZJCHVCRGHV-UHFFFAOYSA-N chloro(disilanylsilyl)silane Chemical group [SiH3][SiH2][SiH2][SiH2]Cl WSCXZJCHVCRGHV-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- HJXBDPDUCXORKZ-UHFFFAOYSA-N diethylalumane Chemical compound CC[AlH]CC HJXBDPDUCXORKZ-UHFFFAOYSA-N 0.000 description 1
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- HCWCAKKEBCNQJP-UHFFFAOYSA-N magnesium orthosilicate Chemical compound [Mg+2].[Mg+2].[O-][Si]([O-])([O-])[O-] HCWCAKKEBCNQJP-UHFFFAOYSA-N 0.000 description 1
- 239000000391 magnesium silicate Substances 0.000 description 1
- 229910052919 magnesium silicate Inorganic materials 0.000 description 1
- 235000019792 magnesium silicate Nutrition 0.000 description 1
- 229910021338 magnesium silicide Inorganic materials 0.000 description 1
- YTHCQFKNFVSQBC-UHFFFAOYSA-N magnesium silicide Chemical compound [Mg]=[Si]=[Mg] YTHCQFKNFVSQBC-UHFFFAOYSA-N 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000005049 silicon tetrachloride Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- -1 sulfuric acid Chemical compound 0.000 description 1
- 238000001308 synthesis method Methods 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- 239000010457 zeolite Substances 0.000 description 1
Landscapes
- Silicon Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17123584A JPS6148420A (ja) | 1984-08-17 | 1984-08-17 | シランの精製方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17123584A JPS6148420A (ja) | 1984-08-17 | 1984-08-17 | シランの精製方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6148420A true JPS6148420A (ja) | 1986-03-10 |
| JPH0480848B2 JPH0480848B2 (enrdf_load_stackoverflow) | 1992-12-21 |
Family
ID=15919548
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17123584A Granted JPS6148420A (ja) | 1984-08-17 | 1984-08-17 | シランの精製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6148420A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2918781C2 (de) | 1979-05-10 | 1983-04-14 | Wolfhart Dr.-Ing. 7000 Stuttgart Andrä | Hydraulisches Kipplager zur Übertragung großer Kräfte zwischen Bauteilen |
| JPH02130476A (ja) * | 1988-11-11 | 1990-05-18 | Nec Corp | Ｉｃクリップ |
| US5057242A (en) * | 1987-03-24 | 1991-10-15 | Novapure Corporation | Composition, process, and apparatus, for removal of water and silicon mu-oxides from chlorosilanes |
-
1984
- 1984-08-17 JP JP17123584A patent/JPS6148420A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2918781C2 (de) | 1979-05-10 | 1983-04-14 | Wolfhart Dr.-Ing. 7000 Stuttgart Andrä | Hydraulisches Kipplager zur Übertragung großer Kräfte zwischen Bauteilen |
| US5057242A (en) * | 1987-03-24 | 1991-10-15 | Novapure Corporation | Composition, process, and apparatus, for removal of water and silicon mu-oxides from chlorosilanes |
| JPH02130476A (ja) * | 1988-11-11 | 1990-05-18 | Nec Corp | Ｉｃクリップ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0480848B2 (enrdf_load_stackoverflow) | 1992-12-21 |
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