JPS6148264B2 - - Google Patents

Info

Publication number
JPS6148264B2
JPS6148264B2 JP4439781A JP4439781A JPS6148264B2 JP S6148264 B2 JPS6148264 B2 JP S6148264B2 JP 4439781 A JP4439781 A JP 4439781A JP 4439781 A JP4439781 A JP 4439781A JP S6148264 B2 JPS6148264 B2 JP S6148264B2
Authority
JP
Japan
Prior art keywords
tunnel gauge
semiconductor device
rail
tunnel
gauge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4439781A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57159048A (en
Inventor
Naoto Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP4439781A priority Critical patent/JPS57159048A/ja
Publication of JPS57159048A publication Critical patent/JPS57159048A/ja
Publication of JPS6148264B2 publication Critical patent/JPS6148264B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Lead Frames For Integrated Circuits (AREA)
JP4439781A 1981-03-26 1981-03-26 Handling device Granted JPS57159048A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4439781A JPS57159048A (en) 1981-03-26 1981-03-26 Handling device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4439781A JPS57159048A (en) 1981-03-26 1981-03-26 Handling device

Publications (2)

Publication Number Publication Date
JPS57159048A JPS57159048A (en) 1982-10-01
JPS6148264B2 true JPS6148264B2 (ko) 1986-10-23

Family

ID=12690370

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4439781A Granted JPS57159048A (en) 1981-03-26 1981-03-26 Handling device

Country Status (1)

Country Link
JP (1) JPS57159048A (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60148196A (ja) * 1984-01-13 1985-08-05 日本電気株式会社 半導体装置の製造装置
JPH0333063Y2 (ko) * 1985-11-27 1991-07-12
JPS62185614A (ja) * 1986-02-10 1987-08-14 Hitachi Electronics Eng Co Ltd Ｉｃハンドラのジヤム解除機構

Also Published As

Publication number Publication date
JPS57159048A (en) 1982-10-01

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