JPS6147067U - 被膜形成装置 - Google Patents
被膜形成装置Info
- Publication number
- JPS6147067U JPS6147067U JP13005084U JP13005084U JPS6147067U JP S6147067 U JPS6147067 U JP S6147067U JP 13005084 U JP13005084 U JP 13005084U JP 13005084 U JP13005084 U JP 13005084U JP S6147067 U JPS6147067 U JP S6147067U
- Authority
- JP
- Japan
- Prior art keywords
- ion plating
- film forming
- forming device
- mechanisms
- cathode type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007733 ion plating Methods 0.000 claims 4
- 230000007246 mechanism Effects 0.000 claims 4
- 230000008020 evaporation Effects 0.000 claims 2
- 238000001704 evaporation Methods 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13005084U JPS6147067U (ja) | 1984-08-28 | 1984-08-28 | 被膜形成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13005084U JPS6147067U (ja) | 1984-08-28 | 1984-08-28 | 被膜形成装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6147067U true JPS6147067U (ja) | 1986-03-29 |
| JPH0238926Y2 JPH0238926Y2 (enrdf_load_stackoverflow) | 1990-10-19 |
Family
ID=30688659
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13005084U Granted JPS6147067U (ja) | 1984-08-28 | 1984-08-28 | 被膜形成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6147067U (enrdf_load_stackoverflow) |
-
1984
- 1984-08-28 JP JP13005084U patent/JPS6147067U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0238926Y2 (enrdf_load_stackoverflow) | 1990-10-19 |
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