JPS6146966B2 - - Google Patents
Info
- Publication number
- JPS6146966B2 JPS6146966B2 JP3415678A JP3415678A JPS6146966B2 JP S6146966 B2 JPS6146966 B2 JP S6146966B2 JP 3415678 A JP3415678 A JP 3415678A JP 3415678 A JP3415678 A JP 3415678A JP S6146966 B2 JPS6146966 B2 JP S6146966B2
- Authority
- JP
- Japan
- Prior art keywords
- annealing
- pressure
- normal pressure
- annealing treatment
- sio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000137 annealing Methods 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000001257 hydrogen Substances 0.000 claims description 2
- 229910052739 hydrogen Inorganic materials 0.000 claims description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims 1
- 229910052757 nitrogen Inorganic materials 0.000 claims 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- 239000007789 gas Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3415678A JPS54127278A (en) | 1978-03-27 | 1978-03-27 | Annealing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3415678A JPS54127278A (en) | 1978-03-27 | 1978-03-27 | Annealing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54127278A JPS54127278A (en) | 1979-10-03 |
| JPS6146966B2 true JPS6146966B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-10-16 |
Family
ID=12406333
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3415678A Granted JPS54127278A (en) | 1978-03-27 | 1978-03-27 | Annealing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54127278A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2579680B2 (ja) * | 1988-12-28 | 1997-02-05 | 東芝セラミックス株式会社 | シリコンウェハの熱処理方法 |
| JPH11340238A (ja) * | 1998-05-27 | 1999-12-10 | Matsushita Electron Corp | 半導体装置の製造方法 |
-
1978
- 1978-03-27 JP JP3415678A patent/JPS54127278A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54127278A (en) | 1979-10-03 |
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