JPS54127278A - Annealing method - Google Patents

Annealing method

Info

Publication number
JPS54127278A
JPS54127278A JP3415678A JP3415678A JPS54127278A JP S54127278 A JPS54127278 A JP S54127278A JP 3415678 A JP3415678 A JP 3415678A JP 3415678 A JP3415678 A JP 3415678A JP S54127278 A JPS54127278 A JP S54127278A
Authority
JP
Japan
Prior art keywords
annealing method
annealing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3415678A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6146966B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Seiichi Iwamatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP3415678A priority Critical patent/JPS54127278A/ja
Publication of JPS54127278A publication Critical patent/JPS54127278A/ja
Publication of JPS6146966B2 publication Critical patent/JPS6146966B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP3415678A 1978-03-27 1978-03-27 Annealing method Granted JPS54127278A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3415678A JPS54127278A (en) 1978-03-27 1978-03-27 Annealing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3415678A JPS54127278A (en) 1978-03-27 1978-03-27 Annealing method

Publications (2)

Publication Number Publication Date
JPS54127278A true JPS54127278A (en) 1979-10-03
JPS6146966B2 JPS6146966B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-10-16

Family

ID=12406333

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3415678A Granted JPS54127278A (en) 1978-03-27 1978-03-27 Annealing method

Country Status (1)

Country Link
JP (1) JPS54127278A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02177542A (ja) * 1988-12-28 1990-07-10 Toshiba Ceramics Co Ltd シリコンウェハの熱処理方法
JPH11340238A (ja) * 1998-05-27 1999-12-10 Matsushita Electron Corp 半導体装置の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02177542A (ja) * 1988-12-28 1990-07-10 Toshiba Ceramics Co Ltd シリコンウェハの熱処理方法
JPH11340238A (ja) * 1998-05-27 1999-12-10 Matsushita Electron Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS6146966B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-10-16

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