JPS6146934B2 - - Google Patents

Info

Publication number
JPS6146934B2
JPS6146934B2 JP53148916A JP14891678A JPS6146934B2 JP S6146934 B2 JPS6146934 B2 JP S6146934B2 JP 53148916 A JP53148916 A JP 53148916A JP 14891678 A JP14891678 A JP 14891678A JP S6146934 B2 JPS6146934 B2 JP S6146934B2
Authority
JP
Japan
Prior art keywords
electron beam
aperture
voltage
piezoelectric effect
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53148916A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5576559A (en
Inventor
Tadashi Nakamura
Tooru Funayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO ERU ESU AI GIJUTSU KENKYU KUMIAI filed Critical CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority to JP14891678A priority Critical patent/JPS5576559A/ja
Publication of JPS5576559A publication Critical patent/JPS5576559A/ja
Publication of JPS6146934B2 publication Critical patent/JPS6146934B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
JP14891678A 1978-12-01 1978-12-01 Electron beam fine adjusting device Granted JPS5576559A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14891678A JPS5576559A (en) 1978-12-01 1978-12-01 Electron beam fine adjusting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14891678A JPS5576559A (en) 1978-12-01 1978-12-01 Electron beam fine adjusting device

Publications (2)

Publication Number Publication Date
JPS5576559A JPS5576559A (en) 1980-06-09
JPS6146934B2 true JPS6146934B2 (enExample) 1986-10-16

Family

ID=15463519

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14891678A Granted JPS5576559A (en) 1978-12-01 1978-12-01 Electron beam fine adjusting device

Country Status (1)

Country Link
JP (1) JPS5576559A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10941392B2 (en) 2012-03-26 2021-03-09 The Regents Of The University Of Colorado, A Body Corporate Purification of cystathionine beta-synthase
US11077175B2 (en) 2015-11-09 2021-08-03 The Regents Of The University Of Colorado, A Body Corporate Compositions and methods for treatment of homocystinuria
US11324811B2 (en) 2017-04-17 2022-05-10 The Regents Of The University Of Colorado, A Body Corporate Optimization of enzyme replacement therapy for treatment of homocystinuria

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58158318U (ja) * 1982-04-17 1983-10-22 株式会社トーキン 積層型変位素子
DE102008034285A1 (de) * 2008-07-22 2010-02-04 Carl Zeiss Smt Ag Aktuator zur hochpräzisen Positionierung bzw. Manipulation von Komponenten und Projektionsbelichtungsanlage für die Mikrolithographie

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51137368A (en) * 1975-05-23 1976-11-27 Hitachi Ltd Movable iris for electron microscope
JPS5315060A (en) * 1976-07-28 1978-02-10 Hitachi Ltd Inching device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10941392B2 (en) 2012-03-26 2021-03-09 The Regents Of The University Of Colorado, A Body Corporate Purification of cystathionine beta-synthase
US11077175B2 (en) 2015-11-09 2021-08-03 The Regents Of The University Of Colorado, A Body Corporate Compositions and methods for treatment of homocystinuria
US11324811B2 (en) 2017-04-17 2022-05-10 The Regents Of The University Of Colorado, A Body Corporate Optimization of enzyme replacement therapy for treatment of homocystinuria

Also Published As

Publication number Publication date
JPS5576559A (en) 1980-06-09

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