JPS5576559A - Electron beam fine adjusting device - Google Patents

Electron beam fine adjusting device

Info

Publication number
JPS5576559A
JPS5576559A JP14891678A JP14891678A JPS5576559A JP S5576559 A JPS5576559 A JP S5576559A JP 14891678 A JP14891678 A JP 14891678A JP 14891678 A JP14891678 A JP 14891678A JP S5576559 A JPS5576559 A JP S5576559A
Authority
JP
Japan
Prior art keywords
rigid bodies
voltage
shaft
elements
fine adjusting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14891678A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6146934B2 (enExample
Inventor
Tadashi Nakamura
Toru Funayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP14891678A priority Critical patent/JPS5576559A/ja
Publication of JPS5576559A publication Critical patent/JPS5576559A/ja
Publication of JPS6146934B2 publication Critical patent/JPS6146934B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
JP14891678A 1978-12-01 1978-12-01 Electron beam fine adjusting device Granted JPS5576559A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14891678A JPS5576559A (en) 1978-12-01 1978-12-01 Electron beam fine adjusting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14891678A JPS5576559A (en) 1978-12-01 1978-12-01 Electron beam fine adjusting device

Publications (2)

Publication Number Publication Date
JPS5576559A true JPS5576559A (en) 1980-06-09
JPS6146934B2 JPS6146934B2 (enExample) 1986-10-16

Family

ID=15463519

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14891678A Granted JPS5576559A (en) 1978-12-01 1978-12-01 Electron beam fine adjusting device

Country Status (1)

Country Link
JP (1) JPS5576559A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58158318U (ja) * 1982-04-17 1983-10-22 株式会社トーキン 積層型変位素子
WO2010009807A1 (de) * 2008-07-22 2010-01-28 Carl Zeiss Smt Ag Aktuator und projektionsbelichtungsanlage

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9243239B2 (en) 2012-03-26 2016-01-26 The Regents Of The University Of Colorado, A Body Corporate Purification of cystathionine beta-synthase
DK3998067T3 (da) 2015-11-09 2024-10-28 Univ Colorado Regents Sammensætninger og fremgangsmåder til behandling af homocystinuri
CA3059592A1 (en) 2017-04-17 2018-10-25 The Regents Of The University Of Colorado, A Body Corporate Optimization of enzyme replacement therapy for treatment of homocystinuria

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51137368A (en) * 1975-05-23 1976-11-27 Hitachi Ltd Movable iris for electron microscope
JPS5315060A (en) * 1976-07-28 1978-02-10 Hitachi Ltd Inching device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51137368A (en) * 1975-05-23 1976-11-27 Hitachi Ltd Movable iris for electron microscope
JPS5315060A (en) * 1976-07-28 1978-02-10 Hitachi Ltd Inching device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58158318U (ja) * 1982-04-17 1983-10-22 株式会社トーキン 積層型変位素子
WO2010009807A1 (de) * 2008-07-22 2010-01-28 Carl Zeiss Smt Ag Aktuator und projektionsbelichtungsanlage
US9766550B2 (en) 2008-07-22 2017-09-19 Carl Zeiss Smt Gmbh Actuators and microlithography projection exposure systems and methods using the same

Also Published As

Publication number Publication date
JPS6146934B2 (enExample) 1986-10-16

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