JPS6146430B2 - - Google Patents
Info
- Publication number
- JPS6146430B2 JPS6146430B2 JP55146581A JP14658180A JPS6146430B2 JP S6146430 B2 JPS6146430 B2 JP S6146430B2 JP 55146581 A JP55146581 A JP 55146581A JP 14658180 A JP14658180 A JP 14658180A JP S6146430 B2 JPS6146430 B2 JP S6146430B2
- Authority
- JP
- Japan
- Prior art keywords
- sintered body
- density
- silicon nitride
- hip
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 58
- 238000005245 sintering Methods 0.000 claims description 34
- 239000000843 powder Substances 0.000 claims description 32
- 239000007789 gas Substances 0.000 claims description 25
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 14
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 14
- 238000004519 manufacturing process Methods 0.000 claims description 12
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- 238000001513 hot isostatic pressing Methods 0.000 claims description 6
- 229910052757 nitrogen Inorganic materials 0.000 claims description 5
- 229910003902 SiCl 4 Inorganic materials 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 4
- 238000000465 moulding Methods 0.000 claims description 2
- 239000002994 raw material Substances 0.000 claims description 2
- 229910052582 BN Inorganic materials 0.000 claims 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims 1
- 150000004767 nitrides Chemical group 0.000 claims 1
- 238000007493 shaping process Methods 0.000 claims 1
- 238000000354 decomposition reaction Methods 0.000 description 13
- 238000005979 thermal decomposition reaction Methods 0.000 description 12
- 230000004580 weight loss Effects 0.000 description 12
- 239000000463 material Substances 0.000 description 10
- 238000005121 nitriding Methods 0.000 description 10
- 239000012298 atmosphere Substances 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 7
- 239000000047 product Substances 0.000 description 6
- 238000011161 development Methods 0.000 description 5
- 239000011863 silicon-based powder Substances 0.000 description 5
- 238000007796 conventional method Methods 0.000 description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 3
- 238000000280 densification Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000001965 increasing effect Effects 0.000 description 3
- 239000003960 organic solvent Substances 0.000 description 3
- 230000000704 physical effect Effects 0.000 description 3
- 239000011148 porous material Substances 0.000 description 3
- 238000000197 pyrolysis Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 238000001308 synthesis method Methods 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000002775 capsule Substances 0.000 description 2
- 238000007731 hot pressing Methods 0.000 description 2
- 239000012299 nitrogen atmosphere Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 238000001272 pressureless sintering Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000005049 silicon tetrachloride Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55146581A JPS5771872A (en) | 1980-10-20 | 1980-10-20 | Manufacture of high density silicon nitride sintered body |
| DE3141590A DE3141590C2 (de) | 1980-10-20 | 1981-10-20 | Verfahren zur Herstellung von hochdichtem gesintertem Siliziumnitrid |
| US07/251,052 US5603876A (en) | 1980-10-20 | 1988-09-26 | Method for producing high density sintered silicon nitride (SI3 N.sub.4 |
| US07/814,806 US5445776A (en) | 1980-10-20 | 1991-12-31 | Method for producing high density sintered silicon nitride (Si3 N.sub.4 |
| US08/463,273 US5665291A (en) | 1980-10-20 | 1995-06-05 | Method for producing high density sintered silicon nitride(Si3 N4) |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55146581A JPS5771872A (en) | 1980-10-20 | 1980-10-20 | Manufacture of high density silicon nitride sintered body |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5771872A JPS5771872A (en) | 1982-05-04 |
| JPS6146430B2 true JPS6146430B2 (ko) | 1986-10-14 |
Family
ID=15410929
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP55146581A Granted JPS5771872A (en) | 1980-10-20 | 1980-10-20 | Manufacture of high density silicon nitride sintered body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5771872A (ko) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5918165A (ja) * | 1982-07-19 | 1984-01-30 | 日本特殊陶業株式会社 | 窒化珪素焼結体の製造方法 |
| JP2549636B2 (ja) * | 1986-10-17 | 1996-10-30 | 株式会社東芝 | セラミツクス製転動体 |
| WO1989003371A1 (en) * | 1987-10-08 | 1989-04-20 | Gorham Advanced Materials Institute | One step sinter/hip processing of ceramics |
| US5518673A (en) * | 1993-10-14 | 1996-05-21 | Saint-Gobain/Norton Industrial Ceramics Corp. | Silicon nitride ceramic having high fatigue life and high toughness |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4838762A (ko) * | 1971-09-17 | 1973-06-07 | ||
| JPS5330612A (en) * | 1976-09-03 | 1978-03-23 | Toshiba Ceramics Co | Manufacture of silicon nitride sintered articles |
| JPS53102320A (en) * | 1977-01-03 | 1978-09-06 | Gen Electric | Silicon nitride sintered articles and manufacture thereof |
| JPS53102321A (en) * | 1977-01-03 | 1978-09-06 | Gen Electric | Silicon nitride sintered articles and manufacture thereof |
| JPS54107914A (en) * | 1978-02-10 | 1979-08-24 | Tokyo Shibaura Electric Co | Production of high density silicon nitride base sintered body |
| JPS54148010A (en) * | 1977-12-23 | 1979-11-19 | Fiat Spa | Sintering silicon nitride compressed body |
-
1980
- 1980-10-20 JP JP55146581A patent/JPS5771872A/ja active Granted
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4838762A (ko) * | 1971-09-17 | 1973-06-07 | ||
| JPS5330612A (en) * | 1976-09-03 | 1978-03-23 | Toshiba Ceramics Co | Manufacture of silicon nitride sintered articles |
| JPS53102320A (en) * | 1977-01-03 | 1978-09-06 | Gen Electric | Silicon nitride sintered articles and manufacture thereof |
| JPS53102321A (en) * | 1977-01-03 | 1978-09-06 | Gen Electric | Silicon nitride sintered articles and manufacture thereof |
| JPS54148010A (en) * | 1977-12-23 | 1979-11-19 | Fiat Spa | Sintering silicon nitride compressed body |
| JPS54107914A (en) * | 1978-02-10 | 1979-08-24 | Tokyo Shibaura Electric Co | Production of high density silicon nitride base sintered body |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5771872A (en) | 1982-05-04 |
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