JPS614576A - スプレ−方法 - Google Patents

スプレ−方法

Info

Publication number
JPS614576A
JPS614576A JP59123275A JP12327584A JPS614576A JP S614576 A JPS614576 A JP S614576A JP 59123275 A JP59123275 A JP 59123275A JP 12327584 A JP12327584 A JP 12327584A JP S614576 A JPS614576 A JP S614576A
Authority
JP
Japan
Prior art keywords
liquid
valve
substrate
system pipe
exhaust system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59123275A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0428431B2 (cg-RX-API-DMAC10.html
Inventor
Kiyofumi Yamada
潔文 山田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hoya Corp
Original Assignee
Hoya Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoya Corp filed Critical Hoya Corp
Priority to JP59123275A priority Critical patent/JPS614576A/ja
Publication of JPS614576A publication Critical patent/JPS614576A/ja
Publication of JPH0428431B2 publication Critical patent/JPH0428431B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Weting (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP59123275A 1984-06-15 1984-06-15 スプレ−方法 Granted JPS614576A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59123275A JPS614576A (ja) 1984-06-15 1984-06-15 スプレ−方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59123275A JPS614576A (ja) 1984-06-15 1984-06-15 スプレ−方法

Publications (2)

Publication Number Publication Date
JPS614576A true JPS614576A (ja) 1986-01-10
JPH0428431B2 JPH0428431B2 (cg-RX-API-DMAC10.html) 1992-05-14

Family

ID=14856531

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59123275A Granted JPS614576A (ja) 1984-06-15 1984-06-15 スプレ−方法

Country Status (1)

Country Link
JP (1) JPS614576A (cg-RX-API-DMAC10.html)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61160933A (ja) * 1985-01-08 1986-07-21 Nec Corp 現像処理装置
JPS6314434A (ja) * 1986-07-04 1988-01-21 Dainippon Screen Mfg Co Ltd 基板表面処理方法および装置
JPS6333824A (ja) * 1986-07-28 1988-02-13 Dainippon Screen Mfg Co Ltd 表面洗浄方法
JPS63168025A (ja) * 1986-12-29 1988-07-12 Tokyo Electron Ltd 現像方法
JPH04288832A (ja) * 1991-03-18 1992-10-13 Nec Yamagata Ltd 半導体装置の製造装置
US6037270A (en) * 1994-06-30 2000-03-14 Kabushiki Kaisha Toshiba Method of manufacturing semiconductor device and methods of processing, analyzing and manufacturing its substrate

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56146467U (cg-RX-API-DMAC10.html) * 1980-03-28 1981-11-05

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56146467U (cg-RX-API-DMAC10.html) * 1980-03-28 1981-11-05

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61160933A (ja) * 1985-01-08 1986-07-21 Nec Corp 現像処理装置
JPS6314434A (ja) * 1986-07-04 1988-01-21 Dainippon Screen Mfg Co Ltd 基板表面処理方法および装置
JPS6333824A (ja) * 1986-07-28 1988-02-13 Dainippon Screen Mfg Co Ltd 表面洗浄方法
JPS63168025A (ja) * 1986-12-29 1988-07-12 Tokyo Electron Ltd 現像方法
JPH04288832A (ja) * 1991-03-18 1992-10-13 Nec Yamagata Ltd 半導体装置の製造装置
US6037270A (en) * 1994-06-30 2000-03-14 Kabushiki Kaisha Toshiba Method of manufacturing semiconductor device and methods of processing, analyzing and manufacturing its substrate

Also Published As

Publication number Publication date
JPH0428431B2 (cg-RX-API-DMAC10.html) 1992-05-14

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