JPS6145175A - 仕切弁 - Google Patents

仕切弁

Info

Publication number
JPS6145175A
JPS6145175A JP16610784A JP16610784A JPS6145175A JP S6145175 A JPS6145175 A JP S6145175A JP 16610784 A JP16610784 A JP 16610784A JP 16610784 A JP16610784 A JP 16610784A JP S6145175 A JPS6145175 A JP S6145175A
Authority
JP
Japan
Prior art keywords
valve body
valve
vacuum processing
processing chamber
connecting pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16610784A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0256544B2 (enrdf_load_stackoverflow
Inventor
Kyoji Kinokiri
恭治 木ノ切
Shigeru Akutsu
圷　繁
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokuda Seisakusho Co Ltd
Original Assignee
Tokuda Seisakusho Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokuda Seisakusho Co Ltd filed Critical Tokuda Seisakusho Co Ltd
Priority to JP16610784A priority Critical patent/JPS6145175A/ja
Publication of JPS6145175A publication Critical patent/JPS6145175A/ja
Publication of JPH0256544B2 publication Critical patent/JPH0256544B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K5/00—Plug valves; Taps or cocks comprising only cut-off apparatus having at least one of the sealing faces shaped as a more or less complete surface of a solid of revolution, the opening and closing movement being predominantly rotary
    • F16K5/04—Plug valves; Taps or cocks comprising only cut-off apparatus having at least one of the sealing faces shaped as a more or less complete surface of a solid of revolution, the opening and closing movement being predominantly rotary with plugs having cylindrical surfaces; Packings therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Taps Or Cocks (AREA)
JP16610784A 1984-08-08 1984-08-08 仕切弁 Granted JPS6145175A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16610784A JPS6145175A (ja) 1984-08-08 1984-08-08 仕切弁

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16610784A JPS6145175A (ja) 1984-08-08 1984-08-08 仕切弁

Publications (2)

Publication Number Publication Date
JPS6145175A true JPS6145175A (ja) 1986-03-05
JPH0256544B2 JPH0256544B2 (enrdf_load_stackoverflow) 1990-11-30

Family

ID=15825145

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16610784A Granted JPS6145175A (ja) 1984-08-08 1984-08-08 仕切弁

Country Status (1)

Country Link
JP (1) JPS6145175A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54110831U (enrdf_load_stackoverflow) * 1978-01-25 1979-08-04

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54110831U (enrdf_load_stackoverflow) * 1978-01-25 1979-08-04

Also Published As

Publication number Publication date
JPH0256544B2 (enrdf_load_stackoverflow) 1990-11-30

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