JPS6144631B2 - - Google Patents
Info
- Publication number
- JPS6144631B2 JPS6144631B2 JP53034764A JP3476478A JPS6144631B2 JP S6144631 B2 JPS6144631 B2 JP S6144631B2 JP 53034764 A JP53034764 A JP 53034764A JP 3476478 A JP3476478 A JP 3476478A JP S6144631 B2 JPS6144631 B2 JP S6144631B2
- Authority
- JP
- Japan
- Prior art keywords
- plate
- surface plate
- shaft
- hole
- adjustment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005498 polishing Methods 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 6
- 239000003082 abrasive agent Substances 0.000 claims description 2
- 239000002184 metal Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Turning (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3476478A JPS54127090A (en) | 1978-03-25 | 1978-03-25 | Polishing machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3476478A JPS54127090A (en) | 1978-03-25 | 1978-03-25 | Polishing machine |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54127090A JPS54127090A (en) | 1979-10-02 |
JPS6144631B2 true JPS6144631B2 (enrdf_load_stackoverflow) | 1986-10-03 |
Family
ID=12423366
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3476478A Granted JPS54127090A (en) | 1978-03-25 | 1978-03-25 | Polishing machine |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54127090A (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5896625B2 (ja) | 2011-06-02 | 2016-03-30 | 株式会社荏原製作所 | 研磨装置に使用される研磨パッドの研磨面を監視する方法および装置 |
-
1978
- 1978-03-25 JP JP3476478A patent/JPS54127090A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS54127090A (en) | 1979-10-02 |
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